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Microfluidic System Comprising MEMS Integrated Circuit

  • US 20090317302A1
  • Filed: 06/20/2008
  • Published: 12/24/2009
  • Est. Priority Date: 06/20/2008
  • Status: Abandoned Application
First Claim
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1. A microfluidic system comprising a MEMS integrated circuit, said MEMS integrated circuit comprising:

  • a silicon substrate having one or more microfluidic channels defined therein;

    at least one layer of control circuitry for controlling one or more microfluidic devices;

    a MEMS layer comprising said one or more microfluidic devices; and

    a polymeric layer covering said MEMS layer,wherein at least part of said polymeric layer provides a seal for at least one of said microfluidic devices.

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