Microfluidic System Comprising MEMS Integrated Circuit
First Claim
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1. A microfluidic system comprising a MEMS integrated circuit, said MEMS integrated circuit comprising:
- a silicon substrate having one or more microfluidic channels defined therein;
at least one layer of control circuitry for controlling one or more microfluidic devices;
a MEMS layer comprising said one or more microfluidic devices; and
a polymeric layer covering said MEMS layer,wherein at least part of said polymeric layer provides a seal for at least one of said microfluidic devices.
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Abstract
A microfluidic system comprising a MEMS integrated circuit. The MEMS integrated circuit comprises: a silicon substrate having one or more microfluidic channels defined therein; at least one layer of control circuitry for controlling one or more microfluidic devices; a MEMS layer comprising the microfluidic devices; and a polymeric layer covering the MEMS layer. Part of the polymeric layer provides a seal for the microfluidic devices.
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Citations
18 Claims
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1. A microfluidic system comprising a MEMS integrated circuit, said MEMS integrated circuit comprising:
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a silicon substrate having one or more microfluidic channels defined therein; at least one layer of control circuitry for controlling one or more microfluidic devices; a MEMS layer comprising said one or more microfluidic devices; and a polymeric layer covering said MEMS layer, wherein at least part of said polymeric layer provides a seal for at least one of said microfluidic devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
wherein said at least part of said polymeric layer provides a mechanical seal between each moveable finger and said wall.
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18. The microfluidic system of claim 1, which is a LOC device Micro Total Analysis System (μ
- TAS).
Specification