PRESSURE MEASUREMENT USING A MEMS DEVICE
First Claim
Patent Images
1. A device for measuring pressure comprising:
- at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers; and
a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.
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Abstract
A device to measure pressure is disclosed. In one embodiment, the device comprises at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.
74 Citations
23 Claims
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1. A device for measuring pressure comprising:
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at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers; and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 11, 12, 13, 14, 15, 16)
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10. The device of claim 10, wherein the applied voltage is a square wave.
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17. A method of measuring pressure comprising:
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applying a voltage across two layers of a MEMS device; measuring a value characteristic of the response time of the device; and determining a pressure about the device based on the measured value.
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18. The method of 17, wherein the value characteristic of the response time is measured by measuring the current induced by a motion of at least one of the layers.
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19. A device for measuring pressure comprising:
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means for applying a voltage across layers of a MEMS device; means for measuring a response time of the device; and means for determining a pressure about the device based on the measured response time. - View Dependent Claims (20, 21, 22)
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23. A device for measuring pressure comprising:
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at least one element comprising two conductive layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a change in voltage applied across the two layers; a measuring module configured to measure current flowing between the two conductive layers as a function of time when there is a change in voltage applied between the two conductive plates; and a processor configured to determine the time difference between when the voltage pulse is applied and when the local maximum of the motion current occurs, wherein the processor is further configured to associate the time difference with an ambient pressure.
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Specification