MICRO ELECTRO MECHANICAL SYSTEMS ELEMENT FOR MEASURING THREE-DIMENSIONAL VECTORS

• US 20090320597A1
• Filed: 06/17/2009
• Published: 12/31/2009
• Est. Priority Date: 06/25/2008
• Status: Abandoned Application

• Current Assignee: Yamaha Corporation
• Original Assignee: Yamaha Corporation
• Inventors: HATTORI, ATSUO
• Application Number:
  US12/486,278
• Publication Number:
  US 20090320597A1
• Time in Patent Office: Days
• US Class Current: 73/514.36
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

Provided that an x-axis, a y-axis and a z-axis are three axes of a rectangular coordinate system, a micro electro mechanical systems element comprises a support section whose length in the y-direction is shorter than a length in the x-direction, parallel arranged two film-like beam sections whose length in the y-direction is shorter than a length in the x-direction, a weight section, whose length in the y-direction is shorter than a length in the x-direction, spanning centers of the two beam sections and comprising a connecting part spanning the two beam sections, two projection parts projecting to opposite directions from the connecting part in a space between the two beam sections, and a plurality of distortion detectors which are placed on each beam section and detect distortion corresponding to deformation of the beam sections to measure xyz components of a vector corresponding to force acting on the weight section.

Claims

1. A micro electro mechanical systems element wherein an x-axis, a y-axis and a z-axis are three axes of a rectangular coordinate system, the micro electro mechanical systems element comprising:

a support section whose length in the y-direction is shorter than a length in the x-direction;

two beam sections whose length in the y-direction is shorter than a length in the x-direction, each beam section being a film spanning the support section in the x-direction and arranged in parallel to the other beam section;

a weight section whose length in the y-direction is shorter than a length in the x-direction and which spans centers of the two beam sections, the weight section comprising a connecting part spanning the two beam sections, two projection parts projecting to opposite directions from the connecting part in a space between the two beam sections; and

a plurality of distortion detectors which are placed on each beam section and detect distortion corresponding to deformation of the beam sections to measure xyz components of a vector corresponding to force acting on the weight section.

2. The micro electro mechanical systems element according to claim 1, wherein the weight section is a cross-shaped when viewed from the z-direction.