ACCESSIBLE STRESS-BASED ELECTROSTATIC MONITORING OF CHEMICAL REACTIONS AND BINDING
First Claim
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1. A sensor comprising:
- a substrate having a first cavity formed in a first surface thereof;
a diaphragm suspended over the first cavity and comprising a conductive portion;
a selective coating on a first face of the diaphragm outside of the first cavity; and
a counterelectrode spaced from and in opposition to the diaphragm,wherein the diaphragm deforms upon interaction of the selective coating with an analyte and thereby alters a capacitance of the sensor in a manner indicative of a degree of interaction.
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Abstract
A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition to the diaphragm. The diaphragm may deform upon interaction of the selective coating with an analyte and thereby alter a capacitance of the sensor in a manner indicative of a degree of interaction.
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Citations
25 Claims
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1. A sensor comprising:
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a substrate having a first cavity formed in a first surface thereof; a diaphragm suspended over the first cavity and comprising a conductive portion; a selective coating on a first face of the diaphragm outside of the first cavity; and a counterelectrode spaced from and in opposition to the diaphragm, wherein the diaphragm deforms upon interaction of the selective coating with an analyte and thereby alters a capacitance of the sensor in a manner indicative of a degree of interaction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of detecting binding to or reaction with a selective material, the method comprising:
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a) providing a sensor comprising; i) a substrate having a first cavity formed in a first surface thereof; ii) a diaphragm suspended over the first cavity and comprising a conductive portion; iii) a selective coating on a first face of the diaphragm outside of the first cavity; and iv) a counterelectrode spaced from and in opposition to the diaphragm, wherein the diaphragm deforms upon interaction of the selective coating with an analyte and thereby alters a capacitance of the sensor; and b) measuring the sensor capacitance to determine a degree of interaction between the analyte and the selective coating. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A method of fabricating a sensor, the method comprising:
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forming a first cavity in a first surface of a substrate; forming a counterelectrode in the first cavity; suspending, over the first cavity, a flexible diaphragm comprising a conductive portion; and applying a selective coating, for interaction with an analyte, to a first face of the diaphragm outside of the first cavity. - View Dependent Claims (23, 24, 25)
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Specification