HEATER DEVICE AND METHOD FOR HIGH PRESSURE PROCESSING OF CRYSTALLINE MATERIALS

• US 20090320745A1
• Filed: 06/12/2009
• Published: 12/31/2009
• Est. Priority Date: 06/25/2008
• Status: Abandoned Application

• Current Assignee: Soraa, Inc.
• Original Assignee: Soraa, Inc.
• Inventors: Nakamura, Shuji, Coulter, Michael T., Speck, James S., D'Evelyn, Mark P.
• Application Number:
  US12/484,095
• Publication Number:
  US 20090320745A1
• Time in Patent Office: Days
• US Class Current: 117/81
• CPC Class Codes: H05B 2203/003 using serpentine layout
• CPC Class Codes: H05B 2203/005 using multiple resistive elements or resistive zones isolated from each other
• CPC Class Codes: H05B 2203/017 Manufacturing methods or apparatus for heaters
• CPC Class Codes: H05B 2203/037 Heaters with zones of different power density
• CPC Class Codes: H05B 3/46 heating conductor mounted on insulating base
• CPC Class Codes: Y10T 117/1092 Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger]

Abstract

An improved heater for processing materials or growing crystals in supercritical fluids is provided. In a specific embodiment, the heater is scalable up to very large volumes and is cost effective. In conjunction with suitable high pressure apparatus, the heater is capable of processing materials at pressures and temperatures of 0.2-2 GPa and 400-1200° C., respectively.

Claims

1. A heater for processing materials in supercritical fluids at high pressure and high temperature, comprising:

at least one inner tube member comprising a first region and a second region, the inner tube member comprising an outer surface region and an inner surface region;

at least two heating elements spatially disposed respectively at least within the first region and the second region;

a thickness of at least one insulating material overlying the at least two heating elements, the thickness of insulating material comprising a first inner surface region and a first outer surface region;

a cylindrical structure provided by at least the inner tube member, the two heating elements, and the thickness of insulating material to form a substantially incompressible sandwiched structure including at least the inner tube member, two heating elements, and thickness of insulating material, the cylindrical structure being substantially free from one or more voids and/or gaps, the one or more gaps and/or voids being capable of causing a failure including a crack and/or creep condition during an operation condition;

a length of no longer than about ten millimeters characterizing the cylindrical structure from an inner portion of the cylindrical structure and an outer portion of the cylindrical structure; and

wherein the inner portion of the cylindrical structure and the outer portion of the cylindrical structure are electrically isolated from the at least two heating elements.

2. The heater of claim 1 wherein the inner portion of the cylindrical structure and the outer portion of the cylindrical structure are characterized by a length of no longer than about six millimeters from the inner portion of the cylindrical structure and to the outer portion of the cylindrical structure.

3. The heater of claim 1 wherein the inner portion of the cylindrical structure and the outer portion of the cylindrical structure are characterized by a length of no longer than about three millimeters from the inner portion of the cylindrical structure and to the outer portion of the cylindrical structure.

4. The heater of claim 1 wherein the insulating material comprises one or more coating materials.

5. The heater of claim 1 wherein the insulating material comprises a tube structure.

6. The heater of claim 1 wherein the substantially incompressible sandwich structure is configured to change in thickness from a first thickness during a first condition to a second thickness during a second condition, the first condition is characterized as an assembly condition and the second condition is characterized as a processing condition, the processing condition has a temperature of at least 450 Degrees Celsius.

7. The heater of claim 6 wherein the processing condition includes temperatures of a least 550 degrees Celsius.

8. The heater of claim 1 wherein the substantially incompressible sandwich structure is substantially free from any filler materials.

9. The heater of claim 1 wherein the heater is disposed within an inner region of a high pressure apparatus.

10. The heater of claim 1 wherein the at least two heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as a double helix.

11. The heater of claim 1 wherein the at least two heating elements are spatially disposed at least within the first region and the second region, respectively, each of the heating elements being configured in a serpentine pattern.

12. The heater of claim 1 wherein the at least two heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as in a U-shaped pattern.

13. The heater of claim 1 wherein the at least two heating elements are spatially disposed respectively at least within the first region and the second region, at least one of the heating elements being configured as a quadruple helix.

14. The heater of claim 1 wherein the at least two heating elements spatially are disposed respectively at least within the first region and the second region, each of the heating elements being configured as a plurality of strips running parallel down an axial direction, at least two of the plurality of strips comprising lengths of at least two different values of resistance per unit length, each of the heating elements configuring a plurality of strips in a spatially parallel manner and electrically parallel.

15. The heater of claim 14 wherein the electrical arrangement is configured to allow one or more of the plurality of strips to be operational while one or more of the plurality of strips is non-operational.

16. The heater of claim 1 wherein at least two heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as a plurality of strips running parallel down an axial direction, at least two of the plurality of strips comprising lengths of at least two different values of resistance per unit length, each of the heating elements configuring a plurality of strips in a spatially parallel manner and electrically serial.

17. The heater of claim 1 wherein at least two heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as a plurality of strips running parallel down an axial direction, at least two of the plurality of strips comprising lengths of at least two different values of resistance per unit length, each of the heating elements configuring the plurality of strips in a spatially parallel manner, and wherein at least two strips are configured to be in series electrically and wherein at least two sets of strips are configured to be in parallel electrically.

18. The heater of claim 1 wherein the inner surface of the heater and the outer surface of the heater each have a root-mean-square surface roughness of about 1 millimeter (mm) and less, wherein the inner surface of the heater is substantially free of gaps and voids, and wherein the second surface of the first tube has a root-mean-square surface roughness less than 0.1 millimeter, or less than 0.01 millimeter, or less than 0.001 millimeter.

19. The heater of claim 1 wherein the first surface of the second tube has a root-mean-square surface roughness less than 0.1 millimeter, or less than 0.01 millimeter, or less than 0.001 millimeter.

20. The heater of claim 1 wherein the inner surface of the heater and the outer surface of the heater each have a root-mean-square surface roughness of about 0.1 millimeter (mm) and less.

21. The heater of claim 1 wherein the inner surface of the heater and the outer surface of the heater each have a root-mean-square surface roughness of about 0.01 millimeter (mm) and less.

22. The heater of claim 1 wherein no region of the inner diameter of the heater has asperities or other features that produce a local inner diameter less by more than 0.005 inches than the mean inner diameter.

23. The heater of claim 1 wherein no region of the outer diameter of the heater has asperities or other features that produce a local outer diameter greater by more than 0.005 inches than the mean outer diameter.

24. The heater of claim 1 wherein each of the two heating elements is electrically isolated between the thickness of insulating material and the inner tube device.

25. The heater of claim 1 is configured to allow processing of a capsule to be free from failure or substantial deformation.

26. The heater of claim 1 wherein the cylindrical structure comprising a first zone and a second zone respective to the first heating element and the second heating element, the first zone and the second zone being spatially disposed respective to a first processing zone and a second processing zone of a capsule, the first zone being configured to provide a substantially uniform first temperature profile along the first processing zone and the second zone being configured to provide a substantially uniform second temperature profile along the second processing zone.

27. The heater of claim 1 further comprising an outer thickness of material overlying the two heating elements.

28. A heater for processing materials in supercritical fluids at high pressure and high temperature, comprising:

at least one inner tube member comprising a first region and a second region, the inner tube member comprising an outer surface region and an inner surface region;

at least two heating elements spatially disposed respectively at least within the first region and the second region;

a thickness of insulating material overlying the two heating elements, the thickness of insulating material comprising an inner surface region and an outer surface region;

an interface region provided between the outer surface region of the inner tube member and the inner surface region of the thickness of insulating material, the interface region being substantially free from one or more voids and/or gaps, the one or more gaps and/or voids being capable of causing a failure including a crack and/or creep condition during an operation condition;

a cylindrical structure provided by at least the inner tube member, the two heating elements, and the thickness of insulating material to form a substantially incompressible sandwiched structure including at least the inner tube member, two heating elements, and thickness of insulating material;

wherein the inner portion of the cylindrical structure and the outer portion of the cylindrical structure are electrically isolated from the at least two heating elements; and

wherein at least two heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as a plurality of strips running parallel down an axial direction, at least two of the plurality of strips comprising lengths of at least two different values of resistance per unit length.

29. The heater of claim 28 wherein at least two heating elements are configured as a plurality of strips in a spatially parallel manner and are electrically in parallel.

30. The heater of claim 28 wherein at least two heating elements are configured as a the plurality of strips in a spatially parallel manner, and wherein at least two strips are configured to be in series electrically and wherein at least two sets of strips are configured to be in parallel electrically.

31. The heater of claim 30 wherein the parallel arrangement is configured to allow one or more of the plurality of strips to be operational while one or more of the plurality of strips is non-operational.

32. The heater of claim 29 wherein the parallel arrangement is configured to allow one or more of the plurality of strips to be operational while one or more of the plurality of strips is non-operational.

33. The heater of claim 28 wherein at least two of the heating elements are configured as a plurality of strips in a spatially parallel manner and are electrically in series.

34. A heater for processing materials in supercritical fluids at high pressure and high temperature, comprising:

at least one inner tube member comprising a first region and a second region, the inner tube member comprising an outer surface region and an inner surface region;

at least two sets of heating elements spatially disposed respectively at least within the first region and the second region;

a thickness of insulating material overlying the two sets of heating elements, the thickness of insulating material comprising a first inner surface region and a first outer surface region;

an interface region provided between the outer surface region of the inner tube member and the first inner surface region of the thickness of insulating material, the interface region being substantially free from one or more voids and/or gaps, the one or more gaps and/or voids being capable of causing a failure including a crack and/or creep condition during an operation condition;

a cylindrical structure provided by at least the inner tube member, the at least two sets of heating elements, and the thickness of insulating material to form a substantially incompressible sandwiched structure including at least the inner tube member, two sets of heating elements, and the thickness of insulating material;

wherein the inner portion of the cylindrical structure and the outer portion of the cylindrical structure are electrically isolated from the at least two heating elements; and

wherein the at least two sets of heating elements are spatially disposed respectively at least within the first region and the second region, each of the heating elements being configured as a plurality of strips running parallel down an axial direction, the ends of each of the plurality of strips distal with respect to the ends of the inner tube being placed in electrical contact with the inner tube.

35. The heater of claim 34 wherein at least two of the heating elements are configured as a plurality of strips in a spatially parallel manner, and wherein at least two strips are configured to be in series electrically and/or wherein at least two sets of strips are configured to be in parallel electrically.

36. Apparatus for processing one or more materials comprising:

at least one heating element configured to transfer thermal energy to a process region within a capsule contained in a high pressure reactor, the high pressure reactor being capable of withstanding a pressure of about 0.2 GPa and greater, the heating element being spatially disposed within a vicinity of the capsule and characterized by a thickness of less than a predetermined amount to maintain an exterior region of the capsule substantially free from damage while the process region of the capsule is subjected to a pressure of about 0.2 GPa and greater.

37. Apparatus of claim 36 wherein the heating element is characterized by the thickness of less than the predetermined amount to have a deformation of less than about 2 mm.

38. Apparatus of claim 36 wherein the heating element is characterized by the thickness of less than the predetermined amount to maintain the exterior region of the capsule free from a deformation of greater than about 2 mm.

39. Apparatus of claim 36 wherein the predetermined thickness is 6 mm and less.

40. Apparatus of claim 36 wherein the predetermined thickness is 3 mm and less.

41. Apparatus of claim 36 wherein the heating element is configured around the exterior region of the capsule.

42. Apparatus of claim 36 wherein the process region comprises a gallium nitride containing crystalline material.

43. Apparatus of claim 36 wherein the deformation is less than about 0.5 mm.

44. Apparatus of claim 36 wherein the exterior region of the capsule is maintained substantially free from damage while the process region of the capsule is subjected to a pressure of about 0.5 GPa and greater.

45. A method for forming crystalline material, the method comprising:

using an apparatus for processing one or more materials comprising at least one heating element configured to transfer thermal energy to a process region within a capsule contained in a high pressure reactor, the high pressure reactor being capable of withstanding a pressure of about 0.2 GPa and greater, the heating element being spatially disposed within a vicinity of the capsule and characterized by a thickness of less than a predetermined amount to maintain an exterior region of the capsule substantially free from damage while the process region of the capsule is subjected to a pressure of about 0.2 GPa and greater; and

forming a gallium nitride crystalline material within one or more portions of the process region.

46. The method of claim 45 comprising using one or more portions of the gallium nitride crystalline material for manufacture of an optical or electronic device.