ELECTROMECHANICAL ELEMENT AND ELECTRONIC EQUIPMENT USING THE SAME

• US 20090321232A1
• Filed: 06/14/2007
• Published: 12/31/2009
• Est. Priority Date: 06/15/2006
• Status: Active Grant

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Naito, Yasuyuki, Nakanishi, Yoshito
• Granted Patent: US 7,978,034 B2
• Time in Patent Office: Days
• US Class Current: 200/181
• CPC Class Codes: B81B 2201/016 having a bridge fixed on two ends and connected to one or more dimples
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01H 69/01 for calibrating or setting of devices to function under predetermined conditions

Abstract

A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a first electrode formed on a substrate, a second electrode formed at a predetermined interval to the first electrode so that the interval is changed, and supporting portions for supporting the second electrode, wherein the supporting portions of the second electrode are able to be displaced.

Claims

1. An electromechanical element, comprising:

a first electrode provided on a substrate;

a second electrode provided at a predetermined interval to the first electrode so that the interval is changed; and

supporting portions which support the second electrode,

wherein the supporting portions of the second electrode suspend the second electrode at a predetermined interval on the first electrode; and

wherein the supporting portions are able to be displaced, and are able to adjust a spring constant of the second electrode.

2. The electromechanical element according to claim 1, wherein the supporting portions of the second electrode are displaced in response to a magnitude of an applied voltage.

3. The electromechanical element according to claim 1, wherein the supporting portions have a supporting body, which supports the second electrode, near at least one end of the second electrode.

4. The electromechanical element according to claim 2, wherein the supporting portions are constructed to displace the second electrode, and are able to adjust an amount of the displacement.

5. The electromechanical element according to claim 4, wherein the supporting body is able to be displaced to support the second electrode at a different height from a surface of the substrate.

6. The electromechanical element according to claim 4, wherein the supporting body is able to be displaced to support the second electrode in a different position in a parallel direction to a surface of the substrate.

7. The electromechanical element according to claim 4, wherein the supporting body is able to be displaced to extend the second electrode in an oblique direction to the first electrode at the supporting portions of the second electrode.

8. The electromechanical element according to claim 4, wherein the supporting body includes a piezoelectric body.

9. The electromechanical element according to claim 8, wherein a side surface of the piezoelectric body is restrained by an elastic body.

10. The electromechanical element according to claim 4, wherein the supporting body is constructed to displace the second electrode by an electrostatic force.

11. The electromechanical element according to claim 1, wherein the supporting portions includes:

a first supporting body that is arranged on the substrate to support the second electrode; and

a second supporting body that is arranged near the first supporting body and is constructed to displace the second electrode by an electrostatic force.

12. The electromechanical element according to claim 11, wherein the second supporting body has a driving electrode that is provided at a predetermined interval to the second electrode so that a potential difference to the second electrode is able to be adjusted.

13. The electromechanical element according to claim 11, wherein the first supporting body is electrically isolated from the second electrode.

14. The electromechanical element according to claim 11, wherein the second supporting body is arranged on an outside of a position that opposes to the first electrode.

15. The electromechanical element according to claim 11, wherein the first supporting body is a column-like structure.

16. The electromechanical element according to claim 1, wherein the supporting portions have a suspending/supporting portion for suspending the second electrode to have an area that opposes to the first electrode, and a supporting body constructed at a predetermined interval from at least one end of the second electrode and provided on the substrate so that a potential difference to the second electrode is able to adjusted respectively.

17. The electromechanical element according to claim 1, wherein the supporting portions are formed to support both ends of the second electrode.

18. The electromechanical element according to claim 1, wherein the second electrode has a H-shaped structure.

19. The electromechanical element according to claim 1, further comprising:

an adjusting mechanism which is able to adjust an amount of displacement of the supporting portions in response to a using environment is provided.

20. The electromechanical element according to claim 19, further comprising:

a using environment sensing portion,

wherein the adjusting mechanism is able to adjust an amount of displacement based on a sensed result of the using environment sensing portion.

21. The electromechanical element according to claim 20, wherein the using environment sensing portion has a temperature sensor.

22. The electromechanical element according to claim 20, wherein the using environment sensing portion has a humidity sensor.