SYSTEMS AND METHODS FOR REDUCED STRESS ANCHORS
First Claim
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1. A method of anchoring a Micro-Electro-Mechanical Systems (MEMS) device to a substrate, the method comprising:
- bonding a trace anchor of the MEMS device to a trace anchor mesa of the substrate, wherein at least one of a trace and a bump induce a stress into the trace anchor; and
bonding a device anchor of the MEMS device to a device anchor mesa of the substrate, wherein the device anchor is flexibly coupled to the trace anchor by an anchor flexure that substantially prevents transmission of the stress induced in the trace anchor to the device anchor.
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Abstract
Anchor systems and methods anchor components of a Micro-Electro-Mechanical Systems (MEMS) device to a substrate. An exemplary embodiment has a trace anchor bonded to a substrate, a device anchor bonded to the substrate, and an anchor flexure configured flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor.
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Citations
14 Claims
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1. A method of anchoring a Micro-Electro-Mechanical Systems (MEMS) device to a substrate, the method comprising:
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bonding a trace anchor of the MEMS device to a trace anchor mesa of the substrate, wherein at least one of a trace and a bump induce a stress into the trace anchor; and bonding a device anchor of the MEMS device to a device anchor mesa of the substrate, wherein the device anchor is flexibly coupled to the trace anchor by an anchor flexure that substantially prevents transmission of the stress induced in the trace anchor to the device anchor. - View Dependent Claims (2, 3, 4)
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5. A Micro-Electro-Mechanical Systems (MEMS) device anchor system, comprising:
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a trace anchor bonded to a substrate; a device anchor bonded to the substrate; and an anchor flexure configured to flexibly couple the trace anchor and the device anchor to substantially prevent transmission of a stress induced in the trace anchor from being transmitted to the device anchor. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 14)
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13. An anchor system for a Micro-Electro-Mechanical Systems (MEMS) device to a substrate, comprising:
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a trace anchor bonded to a a trace on a substrate, wherein the trace anchor is electrically coupled to the trace, and wherein the trace induces stress into the trace anchor in response to the bonding of the trace anchor to the substrate; a device anchor bonded to the substrate; and a means for flexibly coupling and electrically coupling the trace anchor and the device anchor to substantially prevent transmission of the stress induced in the trace anchor from being transmitted to the device anchor.
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Specification