OZONE AND TEOS PROCESS FOR SILICON OXIDE DEPOSITION
First Claim
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1. A method for depositing silicon oxide, comprising:
- providing a batch reactor;
providing a plurality of vertically separated substrates in a reaction chamber of the batch reactor;
chemical vapor depositing silicon oxide on the substrates, wherein chemical vapor depositing comprises;
pulsing tetraethyl orthosilicate (TEOS) into the reaction chamber; and
flowing ozone into the reaction chamber while maintaining a pressure inside the reaction chamber at about 10 Torr or less.
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Abstract
Methods for depositing silicon oxide in a batch reactor are provided. In some embodiments, a plurality of vertically separated substrates is provided in a reaction chamber. Tetraethyl orthosilicate (TEOS) is pulsed into the reaction chamber by direct liquid injection. Ozone is flowed into the reaction chamber simultaneously or alternately with the TEOS. The deposition is performed at about 10 Torr or less to extend the mean free path length of the ozone molecules. According to some embodiments, the deposition allows openings in the substrates to be filled while the occurrence of voids is maintained at a low level.
406 Citations
32 Claims
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1. A method for depositing silicon oxide, comprising:
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providing a batch reactor; providing a plurality of vertically separated substrates in a reaction chamber of the batch reactor; chemical vapor depositing silicon oxide on the substrates, wherein chemical vapor depositing comprises; pulsing tetraethyl orthosilicate (TEOS) into the reaction chamber; and flowing ozone into the reaction chamber while maintaining a pressure inside the reaction chamber at about 10 Torr or less. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for depositing silicon oxide on a substrate, comprising:
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providing the substrate in a reaction chamber; pulsing tetraethyl orthosilicate (TEOS) into the reaction chamber, wherein pulsing TEOS comprises varying the amount of TEOS flowed into the reaction chamber per pulse among a series of the pulses of TEOS; flowing ozone into the reaction chamber; and maintaining a pressure inside the reaction chamber at about 10 Torr or less. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for depositing silicon oxide, comprising:
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providing a substrate in a reaction chamber, the substrate having a trench; and filling the trench with silicon oxide, wherein filling the trench comprises; pulsing tetraethyl orthosilicate (TEOS) into the reaction chamber; flowing ozone into the reaction chamber; and maintaining a pressure inside the reaction chamber at about 10 Torr or less. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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Specification