SENSING DEVICE

• US 20100000292A1
• Filed: 06/30/2009
• Published: 01/07/2010
• Est. Priority Date: 07/02/2008
• Status: Active Grant

• Current Assignee: Stichting Imec Nederland
• Original Assignee: Stichting Imec Nederland
• Inventors: Karakaya, Koray, Karabacak, Devrez Mehmet
• Granted Patent: US 8,291,745 B2
• Time in Patent Office: Days
• US Class Current: 73/24.01
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B

Abstract

A sensing device for detecting an analyte is disclosed. In one aspect, the device includes at least one geometrical structure and at least two clamps provided for clamping the at least one geometrical structure on at least two ends of the geometrical structure. The at least one geometrical structure has at least one chemical responsive layer being absorbent or adsorbent for the analyte, and a support structure provided for at least partly supporting the at least one chemical responsive layer. The at least one chemical responsive layer has a varying effective spring constant which changes upon absorption or adsorption of the analyte.

Claims

1. A sensing device for detecting an analyte, the device comprising:

at least one geometrical structure comprising a peripheral edge, the at least one geometrical structure comprising at least one chemical responsive layer being absorbent or adsorbent for the analyte; and

at least two clamps by which the peripheral edge of the at least one geometrical structure is partially clamped on at least two opposite sides,

wherein the at least one chemical responsive layer has a varying effective spring constant which changes upon absorption or adsorption of the analyte.

2. The sensing device according to claim 1, further comprising:

an actuation system configured to realize vibration of the at least one geometrical structure at a resonance frequency of the geometrical structure; and

a detection system configured to detect a shift in the resonance frequency of the geometrical structure upon absorption or adsorption of the analyte.

3. The sensing device according to claim 2, wherein the actuation system is integrated in one of the at least two clamps and the detection system is integrated in another of the at least two clamps.

4. The sensing device according to claim 1, wherein the at least one geometrical structure comprises a support structure on which the at least one chemical responsive layer is provided.

5. The sensing device according to claim 4, wherein the support structure is structured at its interface with the at least one chemical responsive layer with microscale and/or sub-micronscale grooves or holes.

6. The sensing device according to claim 5, wherein the microscale and/or sub-micronscale grooves extend in a direction perpendicular to a longitudinal axis of the geometrical structure.

7. The sensing device according to claim 1, wherein the at least one chemical responsive layer has a varying volume upon absorption or adsorption of the analyte.

8. The sensing device according to claim 1, wherein the at least one chemical responsive layer has a varying flexural rigidity upon absorption or adsorption of the analyte.

9. The sensing device according to claim 1, wherein the at least one chemical responsive layer has a varying mass upon absorption or adsorption of the analyte.

10. The sensing device according to claim 1, wherein the at least one chemical responsive layer comprises a polymer.

11. The sensing device according to claims 1, wherein the at least one geometrical structure comprises a first and a second chemical responsive layer provided on opposite sides of the geometrical structure.

12. The sensing device according to claim 11, wherein the first and second chemical responsive layers are absorbent or adsorbent for different analytes.

13. The sensing device according to claim 1, wherein the geometrical structure is a beam-shaped structure clamped at two opposite ends.

14. The sensing device according to claim 1, wherein the geometrical structure is a cross-shaped structure clamped at four ends.

15. The sensing device according to claim 1, wherein the geometrical structure is an H-shaped structure clamped at four ends.

16. The sensing device according to claim 1, wherein the geometrical structure has a main axis and is clamped exclusively on opposite ends of the main axis, such that most of the peripheral edge is left free to vibrate.

17. The sensing device according to claim 1, wherein the sensing device comprises a plurality of the geometrical structures.

18. The sensing device according to claim 17, wherein the chemical responsive layers of at least two of the plurality of geometrical structures are absorbent or adsorbent for different analytes.

19. The sensing device according to claim 1, wherein the sensing device further comprises a reference geometrical structure which is substantially not responsive to the analyte.

20. A method of making a sensing device for detecting an analyte, the method comprising:

providing at least one geometrical structure comprising a peripheral edge, the at least one geometrical structure comprising at least one chemical responsive layer being absorbent or adsorbent for the analyte; and

forming at least two clamps by which the peripheral edge of the at least one geometrical structure is partially clamped on at least two opposite sides,

wherein the at least one chemical responsive layer has a varying effective spring constant which changes upon absorption or adsorption of the analyte.