IC Microfluidic Platform With Integrated Magnetic Resonance Probe
First Claim
1. An apparatus for manipulation and analysis of a cell, comprising:
- an integrated circuit (IC) microfluidic platform, wherein the IC microfluidic platform comprises a microchannel for the flow of a fluidic medium having a suspended cell,a plurality of microelectrodes;
an electrode;
a voltage source, wherein a voltage applied between one or more of the plurality of microelectrodes and the electrode by the voltage source creates an electric field in a region of interest within the microchannel capable of manipulation of the suspended cell; and
an RF probe integrated with the IC microfluidic platform, wherein the RF probe is positioned to image the region of interest within the microchannel.
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Abstract
An integrated hybrid microfluidic-IC platform for single cell manipulation and microscopy and method for making the platform. In particular, the integrated platform can incorporate a planar microcoil embedded in a silicon substrate that is subsequently used to fabricate a CMOS IC for the platform. The CMOS IC circuitry provides a two dimensional array of microsites that can incorporate an electrode (microelectrode), sensors, and control logic. A direct conversion receiver (DCR) can also be embedded within the CMOS circuitry to create an integrated IC platform. A microfluidic chamber can be formed on the integrated IC platform. The integrated hybrid platform can provide an increased sensitivity for mass limited samples and high resolution manipulation of biological cells. In addition, individual cell manipulation can be performed via dielectrophoresis (DEP).
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Citations
23 Claims
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1. An apparatus for manipulation and analysis of a cell, comprising:
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an integrated circuit (IC) microfluidic platform, wherein the IC microfluidic platform comprises a microchannel for the flow of a fluidic medium having a suspended cell, a plurality of microelectrodes; an electrode; a voltage source, wherein a voltage applied between one or more of the plurality of microelectrodes and the electrode by the voltage source creates an electric field in a region of interest within the microchannel capable of manipulation of the suspended cell; and an RF probe integrated with the IC microfluidic platform, wherein the RF probe is positioned to image the region of interest within the microchannel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for manufacturing an apparatus for manipulation and analysis of a cell, comprising:
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forming a planar microcoil on a substrate; fabricating a CMOS integrated circuit (IC) on the substrate; attaching the substrate having the planar microcoil and CMOS IC to a Si wafer or PCB having electrical connections; coating the substrate and the Si wafer or PCB with a photoresist; patterning the photoresist to define channel sidewalls of a micro-chamber and to provide open areas for external connections; forming holes on a conductive lid for fluidic tube fittings; and sealing the conductive lid on the channel sidewalls. - View Dependent Claims (23)
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Specification