Radio Frequency (RF) Envelope Pulsing Using Phase Switching of Switch-Mode Power Amplifiers

• US 20100001796A1
• Filed: 07/01/2008
• Published: 01/07/2010
• Est. Priority Date: 07/01/2008
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Sivakumar, Seshadri, Eroglu, Abdullah
• Granted Patent: US 7,872,523 B2
• Time in Patent Office: Days
• US Class Current: 330/251
• CPC Class Codes: H03F 3/2176 Class E amplifiers

Abstract

A radio frequency (RF) power generator includes a first switch-mode amplifier that generates a first RF signal in accordance with a first control signal and a second switch-mode amplifier that generates a second RF signal in accordance with a second control signal. The first and second control signals determine a phase difference between the first and second RF signals. An output signal envelope is based on the first and second RF signals and the phase difference. The first control and second control signals alternate phases of the first and second RF signals.

Claims

1. A radio frequency (RF) power generator, comprising:

a first switch-mode amplifier that generates a first RF signal in accordance with a first control signal; and

a second switch-mode amplifier that generates a second RF signal in accordance with a second control signal, wherein the first and second control signals determine a phase difference between the first and second RF signals and wherein an output signal envelope is based on the first and second RF signals and the phase difference, wherein the first control and second control signals alternate phases of the first and second RF signals.

2. The RF power generator of claim 1 wherein a magnitude of the phase difference is constant while the phases alternate.

3. The RF power generator of claim 1 further comprising first and second transformers that communicate respective ones of the first and second RF signals to a load.

4. The RF power generator of claim 1 wherein the first and second switch-mode amplifiers are Class E amplifiers.

5. The RF power generator of claim 1 wherein the first and second switch-mode amplifiers are Class D amplifiers.

6. The RF power generator of claim 6 wherein the Class D amplifiers comprise respective inductive-capacitance (LC) circuits.

7. The RF power generator of claim 6 wherein the LC circuits include respective inductive clamps.

8. The RF power generator of claim 7 wherein the inductive clamps include diodes.

9. A method of operating a radio frequency (RF) power generator, comprising:

generating a first RF signal that includes a first phase in accordance with a first control signal;

generating a second RF signal that includes a second phase in accordance with a second control signal;

applying the first and second RF signals across a load;

varying the first and second control signals to control an RF envelope that is applied to the load via the first and second RF signals; and

alternating phases of the first and second RF signals.

10. The method of claim 9 further comprising keeping a magnitude of the phase difference constant while alternating the phases.

11. The method of claim 9 further comprising impedance matching the RF signals to the load.

12. The method of claim 9 further comprising providing Class E amplifiers for generating the first and second RF signals.

13. The method of claim 9 further comprising providing Class D amplifiers for generating the first and second RF signals.

14. The method of claim 13 wherein the Class D amplifiers comprise respective inductive-capacitance (LC) circuits.

15. The method of claim 14 wherein the LC circuits include respective inductive clamps.

16. The method of claim 15 wherein the inductive clamps include diodes.

17. A radio frequency (RF) power generator, comprising:

a first Class E amplifier that generates a first RF signal in accordance with a first control signal; and

a second Class E amplifier that generates a second RF signal in accordance with a second control signal, wherein the first and second control signals alternate phases of the first and second RF signals while holding a constant phase difference between the first and RF signals during each phase alternation and wherein an output signal envelope is based on the first and second RF signals and the phase difference.

18. The RF power generator of claim 17 wherein each Class E amplifier includes an inductive clamp.