Structure Including A Graphene Layer And Method For Forming The Same
First Claim
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1. A method for forming a graphene layer, the method comprising:
- establishing an insulating layer on a substrate such that at least one seed region is formed; and
exposing a seed material in the at least one seed region to a carbon-containing precursor gas, thereby initiating nucleation of the graphene layer on the seed material and enabling lateral growth of the graphene layer along at least a portion of a surface of the insulating layer.
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Abstract
A method for forming a graphene layer is disclosed herein. The method includes establishing an insulating layer on a substrate such that at least one seed region, which exposes a surface of the substrate, is formed. A seed material in the seed region is exposed to a carbon-containing precursor gas, thereby initiating nucleation of the graphene layer on the seed material and enabling lateral growth of the graphene layer along at least a portion of a surface of the insulating layer.
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19 Claims
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1. A method for forming a graphene layer, the method comprising:
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establishing an insulating layer on a substrate such that at least one seed region is formed; and exposing a seed material in the at least one seed region to a carbon-containing precursor gas, thereby initiating nucleation of the graphene layer on the seed material and enabling lateral growth of the graphene layer along at least a portion of a surface of the insulating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A structure, comprising:
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a substrate; an insulating layer established on the substrate, the insulating layer including at least one seed region formed therein; a seed material located at the at least one seed region; and a graphene layer extending from the seed material laterally along at least a portion of a surface of the insulating layer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification