MANUFACTURING METHOD OF ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE WITH COLOR FILTER LAYER ON THIN FILM TRANSISTOR
First Claim
1. A method of manufacturing a liquid crystal display device, comprising:
- forming a gate line and a gate electrode on a substrate through a first mask process;
forming a gate insulating layer on substantially an entire surface of the substrate including the gate line and the gate electrode;
forming an active layer, an ohmic contact layer, a source electrode, a drain electrode and a data line on the gate insulating layer through a second mask process by using a single mask, the data line crossing the gate line to define a pixel region;
forming a first passivation layer on substantially an entire surface of the substrate including the source and drain electrodes and the data line;
forming a black matrix on the first passivation layer over the active layer through a third mask process;
forming a color filter layer on the first passivation layer in the pixel region through a fourth mask process;
forming a second passivation layer on substantially an entire surface of the substrate including the black matrix and the color filter layer;
forming a photoresist pattern to expose the second passivation layer corresponding to the pixel region and to a portion of the drain electrode through a fifth mask process;
removing the exposed second passivation and removing a portion of the first passivation layer contacting the second passivation layer to thereby expose the portion of the drain electrode;
forming a transparent conductive layer on substantially an entire surface of the substrate including the exposed portion of the drain electrode and the photoresist pattern; and
forming a pixel electrode in the pixel region by removing the photoresist pattern and the transparent conductive layer on the photoresist pattern, the pixel electrode contacting the exposed portion of the drain electrode, wherein the pixel electrode is disposed in a region excluding the second passivation layer such that the pixel electrode does not overlap the second passivation layer.
0 Assignments
0 Petitions
Accused Products
Abstract
A method of manufacturing a liquid crystal display device includes forming a gate line and a gate electrode on a substrate, forming a gate insulating layer on substantially an entire surface of the substrate, forming an active layer, an ohmic contact layer, a source electrode, a drain electrode and a data line on the gate insulating layer, forming a black matrix on the first passivation layer, forming a color filter layer on the first passivation layer in the pixel region, forming a second passivation layer on substantially an entire surface of the substrate, forming a photoresist pattern to expose the second passivation layer, removing the exposed second passivation and removing a portion of the first passivation layer contacting the second passivation layer, forming a transparent conductive layer on substantially an entire surface of the substrate, and forming a pixel electrode in the pixel region by removing the photoresist pattern and the transparent conductive layer on the photoresist pattern.
-
Citations
11 Claims
-
1. A method of manufacturing a liquid crystal display device, comprising:
-
forming a gate line and a gate electrode on a substrate through a first mask process; forming a gate insulating layer on substantially an entire surface of the substrate including the gate line and the gate electrode; forming an active layer, an ohmic contact layer, a source electrode, a drain electrode and a data line on the gate insulating layer through a second mask process by using a single mask, the data line crossing the gate line to define a pixel region; forming a first passivation layer on substantially an entire surface of the substrate including the source and drain electrodes and the data line; forming a black matrix on the first passivation layer over the active layer through a third mask process; forming a color filter layer on the first passivation layer in the pixel region through a fourth mask process; forming a second passivation layer on substantially an entire surface of the substrate including the black matrix and the color filter layer; forming a photoresist pattern to expose the second passivation layer corresponding to the pixel region and to a portion of the drain electrode through a fifth mask process; removing the exposed second passivation and removing a portion of the first passivation layer contacting the second passivation layer to thereby expose the portion of the drain electrode; forming a transparent conductive layer on substantially an entire surface of the substrate including the exposed portion of the drain electrode and the photoresist pattern; and forming a pixel electrode in the pixel region by removing the photoresist pattern and the transparent conductive layer on the photoresist pattern, the pixel electrode contacting the exposed portion of the drain electrode, wherein the pixel electrode is disposed in a region excluding the second passivation layer such that the pixel electrode does not overlap the second passivation layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
Specification