PROBE-ARRAY SUBSTRATE, PROBE ARRAY, AND METHOD OF PRODUCING THE SAME
First Claim
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1. A probe-array substrate comprising:
- a main surface;
a plurality of probe holding units each comprising a high wettability region arranged on the main surface, the high wettability region exhibiting a relatively high wettability with respect to a probe solution, as indicated by a contact angle therewith of 90°
or less; and
a low wettability region disposed so as to surround each of the plurality of probe holding units,wherein the low wettability region exhibits a relatively low wettability with respect to a probe solution, as indicated by a contact angle therewith of more than 90°
.
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Abstract
A probe-array substrate includes a plurality of probe holding units each having a projection that exhibits a hydrophilicity and a hydrophobic region disposed so as to surround each of the probe holding units. The probe-array substrate can further include an inspection region for use in checking whether mixture of probe solutions is present among the plurality of probe holding units. The inspection region is disposed between the neighboring probe holding units across the hydrophobic region.
54 Citations
21 Claims
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1. A probe-array substrate comprising:
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a main surface; a plurality of probe holding units each comprising a high wettability region arranged on the main surface, the high wettability region exhibiting a relatively high wettability with respect to a probe solution, as indicated by a contact angle therewith of 90°
or less; anda low wettability region disposed so as to surround each of the plurality of probe holding units, wherein the low wettability region exhibits a relatively low wettability with respect to a probe solution, as indicated by a contact angle therewith of more than 90°
.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
where D is an outer diameter of the nozzle, I is a distance from a center of the projection to the low wettability region, θ
2 is a wetting angle between the high wettability region adjacent to the probe holding unit in the probe-array substrate, and θ
3 is a wetting angle between an outer area of the nozzle and the probe solution.
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21. A method of producing a probe array, the method comprising:
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providing a probe-array substrate according to claim 6; providing a supplying unit that has nozzles arranged so as to correspond to the projections, each of the nozzles containing a probe solution; bringing the nozzle of the supplying unit sufficiently near to the corresponding projection to cause the probe solution and the projection to come into contact with each other, and thus guiding the probe solution into the probe holding unit; and separating the nozzle and probe solution; wherein the sequence of providing and positioning and separating steps with a new probe-array substrate in each sequence is repeated until the sequence in which the inspection region contains neither probe solution or dried probe solution is complete.
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Specification