Defect Inspection Method and Apparatus
First Claim
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1. A defect inspection apparatus comprising:
- an illumination section for introducing light emitted from a light source onto a sample;
a detection section for detecting scattered light components scattered in plural directions different from one another, of scattered light from the sample by illumination of the illumination section and outputting a plurality of detected signals corresponding to the detected scattered light components;
a signal processing section for extracting multidimensional features corresponding to defects using the detected signals and comparing the multidimensional features and pre-stored scattered light distribution data thereby to determine the types and sizes of the defects; and
a display unit for displaying a result of determination by the signal processing section.
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Abstract
In a detection step, light produced on a sample in plural directions are collectively detected using a plurality of detectors. Multidimensional features containing information about scattered light distributions are extracted based on a plurality of detector outputs obtained. The feature is compared with data in a scattered light distribution library thereby to determine the types and sizes of defects. In a feature extraction step, a feature outputted based on the magnitude of each of scattered light detected signals of scatterers already known in refractive index and shape, which are obtained in the detection step, is corrected, thereby realizing high precision determination.
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Citations
20 Claims
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1. A defect inspection apparatus comprising:
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an illumination section for introducing light emitted from a light source onto a sample; a detection section for detecting scattered light components scattered in plural directions different from one another, of scattered light from the sample by illumination of the illumination section and outputting a plurality of detected signals corresponding to the detected scattered light components; a signal processing section for extracting multidimensional features corresponding to defects using the detected signals and comparing the multidimensional features and pre-stored scattered light distribution data thereby to determine the types and sizes of the defects; and a display unit for displaying a result of determination by the signal processing section. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A defect inspection apparatus comprising:
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an illumination section for introducing light emitted from a light source onto a sample; a detection section for detecting a plurality of scattered light components emitted in plural directions different from one another, of scattered light produced on the sample by illumination of an illumination optical unit in the illumination section and outputting a plurality of detected signals corresponding thereto; a defect determination unit for processing the detected signals outputted from the detection section to determine the presence of defects; a feature extraction unit for outputting multidimensional features corresponding to the defects determined at the defect determination unit, based on the detected signals; a storage unit for holding a scattered light distribution library corresponding to a set of scattered light distribution data about defects of plural types and sizes; a defect type/size determination unit for determining the types and sizes of defects by comparison between the feature and the scattered light distribution library; and a display unit for displaying a result of classification and a result of size determination obtained at the defect type/size determination unit. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A defect inspection method comprising the steps:
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an illumination step for introducing light emitted from a light source onto a sample; a detection step for detecting a plurality of scattered light components emitted in plural directions different from one another, of scattered light produced on the sample in the illumination step and outputting a plurality of detected signals corresponding thereto; a defect determination step for processing the detected signals obtained in the detection step to determine the presence of defects; a feature extraction step for outputting multidimensional features corresponding to the defects determined in the defect determination step, based on the detected signals; a defect type/size determination step for determining the types and sizes of the defects by comparison between a scattered light distribution library corresponding to a set of scattered light distribution data about defects of a plurality of types and a plurality of sizes held in advance and the feature; and a display step for displaying a result of classification and a result of size determination obtained in the defect type/size determination step. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification