High Performance Sensors and Methods for Forming the Same
First Claim
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1. A sensor comprising:
- a proof mass suspended over a substrate by a suspension beam,wherein a thickness of the suspension beam is less than a thickness of the proof mass.
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Abstract
A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
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Citations
24 Claims
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1. A sensor comprising:
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a proof mass suspended over a substrate by a suspension beam, wherein a thickness of the suspension beam is less than a thickness of the proof mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a sensor, the method comprising:
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forming a first recess in a first surface of a first substrate; bonding a portion of the first surface of the first substrate to a second substrate; and forming a second recess in a second surface of the first substrate, the second recess being disposed over the first recess, thereby forming a suspension beam suspending a proof mass over the second substrate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A method of sensing angular rate, the method comprising:
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providing a sensor comprising; two proof masses, each proof mass (i) being suspended over a substrate by a suspension beam having a thickness less than a thickness of the proof mass it suspends and (ii) including a plurality of mobile comb fingers on at least one edge thereof, and a plurality of stationary comb fingers proximate the two proof masses and interleaved with the mobile comb fingers; applying a voltage between the stationary comb fingers and the proof masses such that the proof masses vibrate approximately parallel to a surface of the substrate; detecting a differential displacement of the two proof masses in a plane approximately perpendicular to the surface of the substrate; and outputting a signal based on the differential displacement, the signal representing an angular rate experienced by the sensor. - View Dependent Claims (21, 22, 23, 24)
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Specification