SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A semiconductor device comprising:
- a tunnel insulating film formed on a surface of a semiconductor region;
a charge storage insulating film formed on a surface of the tunnel insulating film;
a block insulating film formed on a surface of the charge storage insulating film; and
a control gate electrode formed on a surface of the block insulating film,wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing the metal element, silicon, and oxygen as main components.
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Accused Products
Abstract
A semiconductor device includes a tunnel insulating film formed on a surface of a semiconductor region, a charge storage insulating film formed on a surface of the tunnel insulating film, a block insulating film formed on a surface of the charge storage insulating film, and a control gate electrode formed on a surface of the block insulating film, wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing the metal element, silicon, and oxygen as main components.
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Citations
19 Claims
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1. A semiconductor device comprising:
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a tunnel insulating film formed on a surface of a semiconductor region; a charge storage insulating film formed on a surface of the tunnel insulating film; a block insulating film formed on a surface of the charge storage insulating film; and a control gate electrode formed on a surface of the block insulating film, wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing the metal element, silicon, and oxygen as main components. - View Dependent Claims (2, 3, 4)
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5. A semiconductor device comprising:
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a tunnel insulating film formed on a surface of a semiconductor region; a charge storage insulating film formed on a surface of the tunnel insulating film; a block insulating film formed on a surface of the charge storage insulating film; and a control gate electrode formed on a surface of the block insulating film, wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing nitrogen, and the interface layer has a higher nitrogen concentration than each of the first insulating film and the second insulating film. - View Dependent Claims (6, 7, 8)
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9. A semiconductor device comprising:
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a tunnel insulating film formed on a surface of a semiconductor region; a charge storage insulating film formed on a surface of the tunnel insulating film; a block insulating film formed on a surface of the charge storage insulating film; and a control gate electrode formed on a surface of the block insulating film, wherein the block insulating film includes a first insulating film containing a metal element and oxygen as main components, a second insulating film containing silicon and oxygen as main components, and an interface layer formed between the first insulating film and the second insulating film and containing a predetermined element selected from inert gas elements and halogen elements, and the predetermined element in the interface layer has a higher concentration than that in each of the first insulating film and the second insulating film. - View Dependent Claims (10, 11, 12)
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13. A method for manufacturing a semiconductor device comprising a tunnel insulating film formed on a surface of a semiconductor region, a charge storage insulating film formed on a surface of the tunnel insulating film, a block insulating film formed on a surface of the charge storage insulating film, and a control gate electrode formed on a surface of the block insulating film,
forming the block insulating film comprising: -
forming a first insulating film containing a metal element and oxygen as main components; forming a second insulating film containing silicon and oxygen as main components, on a surface of the first insulating film; and carrying out thermal treatment on the first insulating film and the second insulating film in an oxidizing atmosphere. - View Dependent Claims (14, 15, 16)
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17. A method for manufacturing a semiconductor device comprising a tunnel insulating film formed on a surface of a semiconductor region, a charge storage insulating film formed on a surface of the tunnel insulating film, a block insulating film formed on a surface of the charge storage insulating film, and a control gate electrode formed on a surface of the block insulating film,
forming the block insulating film comprising: -
forming a first insulating film containing a metal element and oxygen as main components, in a first depositing atmosphere; forming a second insulating film containing silicon and oxygen as main components, on a surface of the first insulating film; and forming a third insulating film containing a metal element and oxygen as main components, on a surface of the second insulating film in a second depositing atmosphere exerting higher oxidizing power than the first depositing atmosphere. - View Dependent Claims (18, 19)
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Specification