Tilting Actuator with Close-Gap Electrodes
First Claim
1. An electromechanical tilting device comprising a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension configured to define a tilt-containing motion path for the second electrode structure with respect to the first electrode structure, said motion path being configured to cause changes in overlapping regions and overlapping regions'"'"' gaps of the interdigitated electrodes along the motion path, such that an increase in one or more voltage bias applied to interdigitated driving electrodes affects vertical comb and closed gap forces applied to said first and second electrode structures.
1 Assignment
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Accused Products
Abstract
An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions'"'"' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.
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Citations
48 Claims
- 1. An electromechanical tilting device comprising a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension configured to define a tilt-containing motion path for the second electrode structure with respect to the first electrode structure, said motion path being configured to cause changes in overlapping regions and overlapping regions'"'"' gaps of the interdigitated electrodes along the motion path, such that an increase in one or more voltage bias applied to interdigitated driving electrodes affects vertical comb and closed gap forces applied to said first and second electrode structures.
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36. An electromechanical tilting device comprising a first and a second electrode structures and a suspension defining a motion path for the second structure with respect to the first structure, at least one of the structures comprising two electrically isolated electrodes, the device being configured to have in at least a portion of said motion path an electrically energetically favorable direction of motion being dependent on selection of whichever one of said two electrically isolated electrodes is biased.
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- 39. A tunable tilting device comprising a holding element, a tilting element and a suspension structure coupling said elements and defining a tilt-containing motion path for the tilting element with respect to the holding element, the tilting element being substantially responsive to an actuating field of a type acting to cause a motion of the element along said motion path, the suspension structure being configured to bend with a certain bending stiffness to provide the tilting element said motion path, said suspension structure being substantially responsive to a tuning field which is of a type acting to change an extension stress of the structure and thereby to change the bending stiffness of the suspension structure.
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Specification