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BACKSIDE ILLUMINATED IMAGE SENSOR HAVING BIASED CONDUCTIVE LAYER FOR INCREASED QUANTUM EFFICIENCY

  • US 20100006964A1
  • Filed: 07/10/2008
  • Published: 01/14/2010
  • Est. Priority Date: 07/10/2008
  • Status: Abandoned Application
First Claim
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1. A method of forming an image sensor having a pixel array configured for backside illumination, the image sensor including a sensor layer comprising a plurality of photosensitive elements of the pixel array, and a circuit layer comprising circuitry associated with the pixel array, the method comprising the steps of:

  • forming a conductive layer on a backside surface of the sensor layer; and

    coupling the conductive layer through one or more conductive contacts to a bias source in the circuit layer.

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