SCATTERFIELD MICROSCOPICAL MEASURING METHOD AND APPARATUS
First Claim
1. A scatterfield microscopical measuring apparatus, comprising:
- a light source module, for providing a light field;
an objective lens module, being configured with a back focal plane and being disposed at a side of a sample to be inspected;
a spatial light modulator, for modulating an optical characteristic of the light field to form a first beam focusing on the back focal plane while enabling the first beam to project on the sample where it is reflected back as a second beam focusing on the back focal plane; and
a detector, for recording an optical image formed on the back focal plane in response to the second beam.
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Accused Products
Abstract
The present invention provides a scatterfield microscopical measuring method and apparatus, which combine scatterfield detecting technology into microscopical device so that the microscopical device is capable of measuring the sample whose dimension is under the limit of optical diffraction. The scatterfield microscopical measuring apparatus is capable of being controlled to focus uniform and collimated light beam on back focal plane of an objective lens disposed above the sample. By changing the position of the focus position on the back focal plane, it is capable of being adjusted to change the incident angle with respect to the sample.
22 Citations
14 Claims
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1. A scatterfield microscopical measuring apparatus, comprising:
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a light source module, for providing a light field; an objective lens module, being configured with a back focal plane and being disposed at a side of a sample to be inspected; a spatial light modulator, for modulating an optical characteristic of the light field to form a first beam focusing on the back focal plane while enabling the first beam to project on the sample where it is reflected back as a second beam focusing on the back focal plane; and a detector, for recording an optical image formed on the back focal plane in response to the second beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A scatterfield microscopical measuring method, comprising the steps of:
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providing a light field; modulating an optical characteristic of the light field for focusing the light field on a back focal plane of an objective lens module to form a first beam; projecting the first beam on a sample to be inspected where it is reflected and forms a second beam focusing on the back focal plane; recording an optical image formed on the back focal plane in response to the second beam; and performing an adjustment operation for changing the focusing position of the first beam on the back focal plane. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification