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ATMOSPHERIC PRESSURE PLASMA ELECTRODE

  • US 20100009098A1
  • Filed: 09/27/2007
  • Published: 01/14/2010
  • Est. Priority Date: 10/03/2006
  • Status: Abandoned Application
First Claim
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1. An improved electrode useful for modifying a substrate using corona discharge, dielectric barrier discharge or glow discharge plasma treatment or coating a substrate using plasma enhanced chemical vapor deposition under atmospheric or near atmospheric pressure conditions, the electrode comprising a body defining a cavity therein, the body having at least one inlet passageway therethrough in gaseous communication with the cavity so that a gas mixture can be flowed into the cavity by way of the at least one inlet passageway, the electrode having at least one outlet passageway therethrough in gaseous communication with the cavity so that a gas that is flowed into the cavity can flow out of the cavity by way of the at least one outlet passageway, the at least one outlet passageway being a slot, wherein the improvement comprises a porous body positioned in and sealed to the wall of the cavity adjacent to the outlet passageway so that a gas that is flowed into the cavity will pass through the porous body before flowing through the outlet passageway, wherein the porous body is comprised of sintered granules of a solid material that is a glass material or metal material.

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