PROCESSES FOR PREPARING A CATALYST
First Claim
1. A process for preparing a catalyst comprising an inert substrate and a catalytic metal oxide being at or near the surface of the inert substrate, the process comprising:
- impregnating catalytic metal on the surface of or throughout the bulk of an inert substrate; and
heating the metal-impregnated inert substrate to a temperature of at least about 250°
C. to form a catalytic metal oxide at or near the surface of the inert substrate.
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Accused Products
Abstract
Processes for purifying silicon tetrafluoride source gas by subjecting the source gas to one or more purification processes including: contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a catalyst to remove carbon monoxide, by removal of carbon dioxide by use of an absorption liquid, and by removal of inert compounds by cryogenic distillation; catalysts suitable for removal of carbon monoxide from silicon tetrafluoride source gas and processes for producing such catalysts.
20 Citations
17 Claims
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1. A process for preparing a catalyst comprising an inert substrate and a catalytic metal oxide being at or near the surface of the inert substrate, the process comprising:
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impregnating catalytic metal on the surface of or throughout the bulk of an inert substrate; and heating the metal-impregnated inert substrate to a temperature of at least about 250°
C. to form a catalytic metal oxide at or near the surface of the inert substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification