Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element
First Claim
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1. A micromechanical sensor element, comprising:
- a substrate;
a first seismic mass suspended from the substrate, wherein the first seismic mass is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension of the first seismic mass; and
a second seismic mass deflectable by the acceleration from a second rest position;
wherein at least a partial overlap between the first seismic mass and the second seismic mass is provided perpendicular to the main plane of extension.
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Abstract
A micromechanical sensor element includes: a substrate; a first seismic mass suspended from the substrate, which is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension; and a second seismic mass, which is deflectable from a second rest position by the acceleration. At least a partial overlap is provided between the first seismic mass and the second seismic mass perpendicular to the main plane of extension.
37 Citations
12 Claims
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1. A micromechanical sensor element, comprising:
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a substrate; a first seismic mass suspended from the substrate, wherein the first seismic mass is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension of the first seismic mass; and a second seismic mass deflectable by the acceleration from a second rest position; wherein at least a partial overlap between the first seismic mass and the second seismic mass is provided perpendicular to the main plane of extension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing a micromechanical sensor element having a substrate, a first seismic mass suspended from the substrate, wherein the first seismic mass is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension of the first seismic mass, and a second seismic mass deflectable by the acceleration from a second rest position, the method comprising:
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providing, in a first manufacturing step, the substrate together with the first seismic mass; providing, in a second manufacturing step, the second seismic mass suspended from another substrate; and situating, in a subsequent third manufacturing step, the additional substrate on the substrate in such a way that at least a partial overlap is produced between the first seismic mass and the second seismic mass perpendicular to the main plane of extension.
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11. A method for operating a micromechanical sensor element having a substrate, a first seismic mass suspended from the substrate, wherein the first seismic mass is deflectable from a first rest position by an acceleration acting perpendicularly to a main plane of extension of the first seismic mass, and a second seismic mass deflectable by the acceleration from a second rest position, wherein the first seismic mass has first and second first-seismic-mass electrodes, and wherein the second seismic mass has first and second second-seismic-mass electrodes, the method comprising:
determining an acceleration of the micromechanical sensor element by measuring at least one of (a) change of a first electrical capacitance between the first first-seismic-mass electrode and the first second-seismic-mass electrode, and (b) change of a second electrical capacitance between the second first-seismic-mass electrode and the second second-seismic-mass electrode. - View Dependent Claims (12)
Specification