VACUUM VAPOR PROCESSING APPARATUS

• US 20100012035A1
• Filed: 09/10/2007
• Published: 01/21/2010
• Est. Priority Date: 09/11/2006
• Status: Active Grant

• Current Assignee: Ulvac Incorporated
• Original Assignee: Ulvac Incorporated
• Inventors: Yoshiizumi, Ryou, Katou, Takeo, Mukae, Ichirou, Itou, Masami, Shingaki, Yoshinori, Nagata, Hiroshi, Nakatsuka, Atsushi, Nakamura, Kyuzo
• Granted Patent: US 8,375,891 B2
• Time in Patent Office: Days
• US Class Current: 118/725
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: H01F 41/0293 diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets

Abstract

There is provided a vacuum evaporating apparatus which is suitable for performing a process in which a metal vapor atmosphere is formed in a processing chamber, the metal atoms in this metal vapor atmosphere are caused to be adhered to the surface of an object to be processed, and the metal atoms adhered to the surface of the object to be processed are diffused into grain boundary phases thereof. The apparatus comprises: a processing furnace (11); at least one processing box (4) disposed inside the processing furnace; and a heating means (2) provided inside the processing furnace so as to enclose the processing box. An evacuating means is provided which, after housing the processing box inside the processing furnace in a state in which the object to be processed (S) and the metal evaporating material (V) are disposed in the processing box, reduces the processing furnace and the processing box to a predetermined pressure and keep them at that pressure. The heating means is operated in the reduced pressure to evaporate the metal evaporating material while increasing the object to be processed to a predetermined temperature. The evaporated metal atoms are supplied to the surface of the object to be processed.

Claims

1. A vacuum evaporating apparatus comprising:

a processing furnace;

at least one processing box disposed inside the processing furnace;

a heating means for heating the processing box; and

an evacuating means for evacuating the processing furnace and the processing box to a predetermined pressure in a state in which an object to be processed and a metal evaporating material are disposed in the processing box,

wherein the heating means is operated at a reduced pressure to heat the object to be processed to a predetermined temperature at which the metal evaporating material is evaporated so that the evaporated metal atoms are supplied to the surface of the object to be processed.

2. The vacuum evaporating apparatus according to claim 1, wherein the processing box is free to be put into, or taken out of, the processing furnace, and comprises:

a box part which is open on an upper surface and a lid part which is detachably mounted on the open upper surface, wherein the processing box is depressurized as a result of depressurization of the processing furnace by operating the evacuating means.

3. The vacuum evaporating apparatus according to claim 1, wherein the heating means and the processing box are formed of a material that is free from reaction with the metal evaporating material or are made of a constituting element having formed an inner lining film of a material that is free from reaction with the metal evaporating material.

4. The vacuum evaporating apparatus according to claim 3, wherein the material that is free from reaction with the metal evaporating material is Mo.

5. The vacuum evaporating apparatus according to claim 1, wherein the heating means comprises an insulating material enclosing the circumference of the processing box and a heat generating member disposed on the inside of the insulating material, wherein the insulating material is made by laminating plural numbers at a predetermined distance from one another.

6. The vacuum evaporating apparatus according to claim 1, further comprising a setting part capable of placing thereon the object to be processed at a predetermined height from a bottom surface of the processing box, wherein the setting part is constituted by disposing a plurality of wire members.

7. The vacuum evaporating apparatus according to claim 1, further comprising a holding part which is capable of holding therein the metal evaporating material.

8. The vacuum evaporating apparatus according to claim 7, wherein the holding part is disposed on a side wall of the processing box in a manner to enclose the object to be processed.

9. The vacuum evaporating apparatus according to claim 7, wherein the holding part is positioned between objects to be processed that are disposed in the processing box.

10. The vacuum evaporating apparatus according to claim 5, wherein the heating means comprises a plurality of communication passages, gas passages in communication with the communication passages are provided between the heating means and an inner wall of the processing furnace, and the gas passages are connected to an air-cooling means comprising a fan and a heat exchanger.

11. The vacuum evaporating apparatus according to claim 1, wherein the object to be processed is Fe—

B-rare earth sintered magnet and wherein the metal evaporating material is at least one of Dy and Tb.

12. The vacuum evaporating apparatus according to claim 2, wherein the heating means and the processing box are formed of a material that is free from reaction with the metal evaporating material or are made of a constituting element having formed an inner lining film of a material that is free from reaction with the metal evaporating material.

13. The vacuum evaporating apparatus according to claim 2, wherein the heating means comprises an insulating material enclosing the circumference of the processing box and a heat generating member disposed on the inside of the insulating material, wherein the insulating material is made by laminating plural numbers at a predetermined distance from one another.

14. The vacuum evaporating apparatus according to claim 3, wherein the heating means comprises an insulating material enclosing the circumference of the processing box and a heat generating member disposed on the inside of the insulating material, wherein the insulating material is made by laminating plural numbers at a predetermined distance from one another.

15. The vacuum evaporating apparatus according to claim 4, wherein the heating means comprises an insulating material enclosing the circumference of the processing box and a heat generating member disposed on the inside of the insulating material, wherein the insulating material is made by laminating plural numbers at a predetermined distance from one another.

16. The vacuum evaporating apparatus according to claim 2, further comprising a setting part capable of placing thereon the object to be processed at a predetermined height from a bottom surface of the processing box, wherein the setting part is constituted by disposing a plurality of wire members.

17. The vacuum evaporating apparatus according to claim 3, further comprising a setting part capable of placing thereon the object to be processed at a predetermined height from a bottom surface of the processing box, wherein the setting part is constituted by disposing a plurality of wire members.

18. The vacuum evaporating apparatus according to claim 2, further comprising a holding part which is capable of holding therein the metal evaporating material.

19. The vacuum evaporating apparatus according to claim 3, further comprising a holding part which is capable of holding therein the metal evaporating material.

20. The vacuum evaporating apparatus according to claim 2, wherein the object to be processed is Fe—

B-rare earth sintered magnet and wherein the metal evaporating material is at least one of Dy and Tb.