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ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS

  • US 20100012036A1
  • Filed: 07/13/2009
  • Published: 01/21/2010
  • Est. Priority Date: 07/11/2008
  • Status: Abandoned Application
First Claim
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1. A multi single wafer (MSW) processing apparatus comprising two or more semi-isolated reaction chambers and a separate indexer volume, the reaction chambers being separated from one another by isolation regions configured with two or more tongue-in groove (TIG) elements, at least one of which is configured in a staircase-like fashion, and in which each gas flow pathway through the TIG elements is independently purged via independent purge lines.

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