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Micro-Electro-Mechanical Transducer Having a Surface Plate

  • US 20100013574A1
  • Filed: 09/28/2009
  • Published: 01/21/2010
  • Est. Priority Date: 08/03/2005
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical transducer having a movable mechanical part to transform energy, the transducer comprising:

  • a base including a first electrode;

    a spring layer connected to the base through a spring anchor to form a cantilever; and

    a mass layer connected to the spring layer through a spring-mass connector, wherein the spring layer or the mass layer includes a second electrode.

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