CAVITY ENHANCED PHOTO ACOUSTIC GAS SENSOR

• US 20100014086A1
• Filed: 07/21/2008
• Published: 01/21/2010
• Est. Priority Date: 07/21/2008
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cole, Barrett E.
• Granted Patent: US 7,663,756 B2
• Time in Patent Office: Days
• US Class Current: 356/437
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids

Abstract

Devices and method for photo acoustically detecting a gas are disclosed. In one illustrative embodiment, a gas sensor includes an optical cavity defined by one or more optical segments separating at least two mirrors. A photo acoustic cell, configured to receive a gas from the surrounding environment, is provided at least partially within one or more of the optical segments of the optical cavity. One of the at least two mirrors is configured to couple electromagnetic radiation into the optical cavity and to interact with the gas. A detector is acoustically coupled to the photo acoustic cell to detect absorption of the electromagnetic radiation by the gas.

Claims

1. A gas sensor comprising:

an electromagnetic radiation source configured to emit a beam of light;

an optical cavity defined by one or more optical segments separating at least two mirrors, the at least two mirrors being configured to reflect the beam of light through the one or more optical segments, wherein one of the at least two mirrors is an entrance mirror configured to couple at least a portion of the beam of light from the electromagnetic radiation source into the optical cavity;

a photo acoustic cell provided at least partially in the one or more of the optical segments of the optical cavity, the photo acoustic cell configured to receive a gas and contain the gas so as to prevent the at least two mirrors from being exposed to the gas; and

a detector acoustically coupled to the photo acoustic cell, the detector configured to detect an acoustic signal that is related to the absorption of the beam of light by the gas in the photo acoustic cell.

2. The gas sensor of claim 1 wherein the beam of light is tuned to an absorption line of the gas.

3. The gas sensor of claim 1 wherein one of the at least three mirrors is electrically deformable.

4. The gas sensor of claim 3 wherein the one of the at least two mirrors that is electrically deformable deforms around at least one node position according to an applied electrical potential.

5. The gas sensor of claim 3 wherein the one of the at least two mirrors that is electrically deformable is a piezoelectric mirror.

6. The gas sensor of claim 4 wherein the at least one node position of the one of the at least two mirrors that is electrically deformable provides a resonance condition in the optical cavity.

7. The gas sensor of claim 6 wherein the rate of time that the one of the at least two mirrors that is electrically deformable moves in and out of the at least one node position is a first period of time.

8. The gas sensor of claim 7 wherein the absorption of the beam of light by the gas creates one or more pressure pulses in the photo acoustic cell, and wherein the detector is an acoustical detector that detects the one or more pressure pulses.

9. The gas sensor of claim 7 wherein the time that it takes the gas to absorb the beam of light after the one of the at least two mirrors that is electrically deformable deforms moves the optical cavity out of resonance is a second period of time, the second period of time being less than the first period of time.

22. The gas sensor of claim 1 wherein the beam of light has a first intensity when the beam of light is emitted from the electromagnetic radiation source, the first intensity may be compared to a second intensity of the beam of light that exits the optical cavity through one of the at least three mirror to normalize the photo acoustic cell to the first intensity of the beam of light.

10-11. -11. (canceled)

12. A photo acoustic gas sensor comprising:

a laser configured to emit a beam of light having a wavelength corresponding to an absorption wavelength of a gas to be detected;

an optical cavity including at least two mirrors separated by one or more optical segments, wherein one of the at least two mirrors couples the beam of light from the laser into the optical cavity, wherein one of the at least two mirrors is electrically tunable to move the optical cavity in and out of a resonance condition, wherein the one of the at least two mirrors that is electrically tunable is configured to deform the mirror around at least one node position according to an applied electrical signal;

a photo acoustic cell disposed at least partially within one or more of the optical segments of the optical cavity, the photo acoustic cell configured to receive the gas to be detected; and

an acoustical detector acoustically coupled to the photo acoustic cell to detect the interaction of the beam of light and the gas.

13. The gas sensor of claim 12 wherein the at least one node position of the one of the at least two mirrors provides the resonance condition in the optical cavity.

14. The gas sensor of claim 13 wherein the one of the at least two mirrors that is electrically tunable moves in and out of the at least one node position at a first period of time.

15. The gas sensor of claim 12 wherein the interaction of the beam of light and the gas is an absorption of the beam of light by the gas that creates one or more pressure pulses in the photo acoustic cell.

16. The gas sensor of claim 15 wherein the acoustical detector detects the one or more pressure pulses in the photo acoustic cell.

21. The gas sensor of claim 12 wherein the deformation of the one of the at least two mirrors that is electrically tunable changes the focal length of the one of the at least two mirrors that is electrically tunable.

23. The gas sensor of claim 12 wherein the one of the at least two mirrors that is electrically tunable is a piezoelectric mirror.

17. A method of photo acoustically detecting a gas, the method comprising:

activating a laser to provide a light beam having a wavelength corresponding to an absorption line of a gas;

transmitting the light beam into an optical cavity via one of at least two mirrors, wherein the optical cavity including the at least two mirrors separated by one or more optical segments, wherein one of the at least two mirrors is electrically deformable according to an applied electrical signal;

providing a gas in a photo acoustic cell, wherein the photo acoustic cell intersects one or more of the optical segments; and

detecting an absorption of the laser beam by the gas in the photo acoustic cell with an acoustical detector.

19. The method of claim 17 wherein the one of the at least two mirrors that is electrically deformable has a node position providing a resonance condition in the optical cavity.

20. The method of claim 19 further comprising moving the one of the at least two mirrors that is electrically deformable in and out of the node position at a rate of time causing the optical cavity to move in and out of the resonance condition at the rate of time.

18. (canceled)