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METHOD FOR FORMING SRTIO3 FILM AND STORAGE MEDIUM

  • US 20100015335A1
  • Filed: 02/27/2008
  • Published: 01/21/2010
  • Est. Priority Date: 03/01/2007
  • Status: Active Grant
First Claim
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1. A method for forming an SrTiO3 film, comprising the steps of:

  • placing a substrate in a processing chamber;

    heating the substrate; and

    introducing a gaseous Sr material, a gaseous Ti material and a gaseous oxidizing agent into the processing chamber,wherein an Sr amine compound or an Sr imine compound is used as the Sr material, and the Sr material, the Ti material and the oxidizing agent are reacted with each other on the heated substrate to form an SrTiO3 film on the substrate.

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