DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS
First Claim
1. An article comprising:
- a thermoplastic and an adherent diamond like carbon coating on one or more surfaces of said thermoplastic, said adherent diamond like carbon coating has a permeability coefficient for helium gas that is at least 10 times less than the permeability coefficient for helium of said thermoplastic, the diamond like carbon coating has a surface resistivity of from about 107 to about 1014 ohm/square and said adherent diamond like carbon coating has a transmittance that is 0% to 70% less than the transmittance of said thermoplastic to light in the range of 300 nm to 1100 nm.
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Accused Products
Abstract
Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.
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Citations
17 Claims
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1. An article comprising:
a thermoplastic and an adherent diamond like carbon coating on one or more surfaces of said thermoplastic, said adherent diamond like carbon coating has a permeability coefficient for helium gas that is at least 10 times less than the permeability coefficient for helium of said thermoplastic, the diamond like carbon coating has a surface resistivity of from about 107 to about 1014 ohm/square and said adherent diamond like carbon coating has a transmittance that is 0% to 70% less than the transmittance of said thermoplastic to light in the range of 300 nm to 1100 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method comprising:
selling a substrate enclosure having at least one diamond like carbon or doped diamond like carbon coated surface on a thermoplastic of said enclosure, said diamond like carbon or doped diamond like carbon coated surface has a surface resistivity in the range of from 107 ohm per square to 1014 ohm per square and a percent transmittance that is at least 70% of the thermoplastic from 300 nm to 1100 nm, and a gas permeation coefficient for helium of 0.59 Barrers or less. - View Dependent Claims (13, 14, 15)
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16. A method comprising:
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determining client requirements for protecting a substrate with a housing having at least one diamond like carbon or doped diamond like carbon coated surface, said requirements include the surface resistivity of the coated surface, light transmittance of the coated surface, gas permeability of the coated surface, or any combination of these; and contacting a central server or database to input the client requirements for protecting the substrate with a housing having at least one diamond like carbon or doped diamond like carbon coated surface and coating at least one housing surface with a diamond like carbon coating or a doped diamond like coating to meet the client requirements. - View Dependent Claims (17)
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Specification