PRESSURE-BASED FLUID FLOW SENSOR
First Claim
Patent Images
1. A volumetric fluid flow sensor, comprisinga flow channel for flowing a fluid therein;
- a diaphragm having an outer surface within said flow channel, said diaphragm comprising at least one flow disrupting feature mechanically coupled to or emerging from said outer surface; and
a sensing structure coupled to said diaphragm for generating a sensing signal responsive to a pressure signal on said diaphragm.
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Abstract
A volumetric fluid flow sensor (100) includes a flow channel (120) for flowing a fluid therein; and a diaphragm (110) having an outer surface within the flow channel (120). The diaphragm (110) includes at least one flow disrupting feature mechanically coupled to or emerging from the outer surface of the diaphragm (110). A sensing structure (126) is coupled to the diaphragm (110) for generating a sensing signal responsive to a pressure signal on the diaphragm (110).
39 Citations
14 Claims
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1. A volumetric fluid flow sensor, comprising
a flow channel for flowing a fluid therein; -
a diaphragm having an outer surface within said flow channel, said diaphragm comprising at least one flow disrupting feature mechanically coupled to or emerging from said outer surface; and a sensing structure coupled to said diaphragm for generating a sensing signal responsive to a pressure signal on said diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for sensing a volumetric flow of a fluid, comprising:
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flowing a fluid over a diaphragm having an outer surface within a flow channel, wherein said diaphragm comprises at least one flow disrupting feature mechanically coupled to or emerging from said outer surface; generating a sensing signal responsive to a pressure signal from a portion of said diaphragm, and determining a flow rate of said fluid from said sensing signal. - View Dependent Claims (12, 13, 14)
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Specification