MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD, DEVICE MANUFACTURING METHOD, MANUFACTURING METHOD OF MOVABLE BODY APPARATUS, AND MOVABLE BODY DRIVE METHOD

• US 20100018950A1
• Filed: 09/03/2009
• Published: 01/28/2010
• Est. Priority Date: 03/05/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: KUDO, Yoshihiko, AOKI, Yasuo, SHIRASU, Hiroshi
• Granted Patent: US 9,366,974 B2
• Time in Patent Office: Days
• US Class Current: 216/41
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70

Abstract

A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.

Claims

1. A movable body apparatus, comprising:

a movable body that can move;

a support device that supports an empty weight of the movable body, and can move; and

a drive device that drives the movable body and also drives the support device according to movement of the movable body.

2. The movable body apparatus according to claim 1, wherein

the drive device drives the support device so that the support device maintains support of the movable body.

3. The movable body apparatus according to claim 1, wherein

the drive device includes a first drive section that drives the movable body, and

the first drive section is moved together with the support device.

4. The movable body apparatus according to claim 3, wherein

the support device is placed separately from the first drive section in terms of vibration.

5. The movable body apparatus according to claim 3, wherein

the support device and the first drive section are respectively placed on different members.

6. The movable body apparatus according to claim 3, wherein

the drive device further includes a second drive section that moves the first drive section, and moves the support device by movement of the first drive section.

7. The movable body apparatus according to claim 3, wherein

the first drive section moves the movable body in a noncontact manner and is connected to the support device.

8. The movable body apparatus according to claim 3, wherein

the first drive section is connected to the support device by using one of a mechanical method, a method using a static pressure of a gas, a magnetic method and an electromagnetic method.

9. The movable body apparatus according to claim 1, wherein

the drive device includes a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device, and

the support device is placed separately from the first and second drive sections in terms of vibration.

10. The movable body apparatus according to claim 9, wherein

the first drive section is connected to the support device and the second drive section moves the support device via the first drive section.

11. The movable body apparatus according to claim 1, wherein

the drive device includes a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device, and

the movable body is placed separately from the first and second drive sections in terms of vibration.

12. The movable body apparatus according to claim 11, wherein

the first drive section is connected to the support device and the second drive section moves the support device via the first drive section.

13. The movable body apparatus according to claim 1, wherein

the drive device moves the movable body in two-dimensional directions.

14. The movable body apparatus according to claim 1, wherein

the movable body has at least three degrees of freedom relative to the support device.

15. The movable body apparatus according to claim 14, wherein

the movable body has at least one of a spherical bearing and a plurality of planar bearings.

16. The movable body apparatus according to claim 1, further comprising:

a measurement device that is arranged between the movable body and the support device and measures a position of the movable body relative to the support device.

17. The movable body apparatus according to claim 1, further comprising:

a coupling device that mechanically couples the movable body and the drive device during acceleration of the movable body and makes the movable body and the drive device be in a noncontact state during constant speed movement of the movable body.

18. A pattern forming apparatus that forms a pattern on an object, the apparatus comprising:

the movable body apparatus according to claim 1, in which the object is held on the movable body; and

a patterning device that forms the pattern on the object.

19. The pattern forming apparatus according to claim 18, wherein

the patterning device forms the pattern by irradiating the object with an energy beam.

20. A pattern forming method, comprising:

forming a pattern on an object using the pattern forming apparatus according to claim 18.

21. A device manufacturing method using the pattern forming method according to claim 20.

22. A movable body apparatus, comprising:

a movable body that can move;

a support device that supports an empty weight of the movable body, and can move; and

a drive device that drives the movable body by movement of the support device and relative movement of the movable body and the support device.

23. The movable body apparatus according to claim 22, wherein

the drive device includes a first drive section that relatively moves the movable body and the support device, and

the first drive section is moved together with the movable body.

24. The movable body apparatus according to claim 23, wherein

the support device is placed separately from the first drive section in terms of vibration.

25. The movable body apparatus according to claim 23, wherein

the support device and the first drive section are respectively placed on different members.

26. The movable body apparatus according to claim 23, wherein

the drive device further includes a second drive section that moves the first drive section, and moves the support device by movement of the first drive section.

27. The movable body apparatus according to claim 23, wherein

the first drive section moves the movable body in a noncontact manner and is connected to the support device.

28. The movable body apparatus according to claim 27, wherein

the first drive section is connected to the support device by using one of a mechanical method, a method using a static pressure of a gas, a magnetic method and an electromagnetic method.

29. The movable body apparatus according to claim 22, wherein

the drive device includes a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device, and

the support device is placed separately from the first and second drive sections in terms of vibration.

30. The movable body apparatus according to claim 29, wherein

the first drive section is connected to the support device and the second drive section moves the support device via the first drive section.

31. The movable body apparatus according claim 22, wherein

the drive device includes a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device, and

the movable body is placed separately from the first and second drive sections in terms of vibration.

32. The movable body apparatus according to claim 31, wherein

the first drive section is connected to the support device and the second drive section moves the support device via the first drive section.

33. The movable body apparatus according to claim 22, wherein

the drive device moves the support device in two-dimensional directions.

34. The movable body apparatus according to claim 22, wherein

the movable body has at least three degrees of freedom relative to the support device.

35. The movable body apparatus according to claim 34, wherein

the movable body has at least one of a spherical bearing and a plurality of planar bearings.

36. The movable body apparatus according to claim 22, further comprising:

a measurement device that is arranged between the movable body and the support device and measures a position of the movable body relative to the support device.

37. The movable body apparatus according to claim 22, further comprising:

a coupling device that mechanically couples the movable body and the drive device during acceleration of the movable body and makes the movable body and the drive device be in a noncontact state during constant speed movement of the movable body.

38. A pattern forming apparatus that forms a pattern on an object, the apparatus comprising:

the movable body apparatus according to claim 22, in which the object is held on the movable body; and

a patterning device that forms the pattern on the object.

39. The pattern forming apparatus according to claim 38, wherein

the patterning device forms the pattern by irradiating the object with an energy beam.

40. A pattern forming method, comprising:

forming a pattern on an object using the pattern forming apparatus according to claim 38.

41. A device manufacturing method using the pattern forming method according to claim 40.

42. A movable body apparatus, comprising:

a base having a guiding surface;

a movable body that can move relative to the base; and

a support device that supports an empty weight of the movable body and can move on the guiding surface according to movement of the movable body, wherein

the movable body is supported by the support device so that the movable body can overhang the guiding surface.

43. The movable body apparatus according to claim 42, wherein

an area where the movable body can move is larger than the guiding surface.

44. The movable body apparatus according to claim 42, wherein

a projection area of the support device projected on the guiding surface is smaller than a projection area of the movable body projected on the guiding surface, in a support direction in which the support device supports the movable body.

45. The movable body apparatus according to claim 42, wherein

a fluid bearing is formed between the support device and the movable body and between the support device and the base.

46. The movable body apparatus according to claim 42, wherein

the support device has a drive device that drives the movable body in the support direction.

47. The movable body apparatus according to claim 42, wherein

the movable body has at least three degrees of freedom relative to the support device.

48. The movable body apparatus according to claim 42, further comprising:

a measurement device that is arranged between the movable body and the support device and measures a position of the movable body relative to the support device.

49. A pattern forming apparatus that forms a pattern on an object, the apparatus comprising:

the movable body apparatus according to claim 42, in which the object is held on the movable body; and

a patterning device that forms the pattern on the object.

50. The pattern forming apparatus according to claim 49, wherein

the patterning device forms the pattern by irradiating the object with an energy beam.

51. A pattern forming method, comprising:

forming a pattern on an object using the pattern forming apparatus according to claim 49.

52. A device manufacturing method using the pattern forming method according to claim 51.

53. A manufacturing method of a movable body apparatus, comprising:

providing a base having a guiding surface;

providing a movable body that can move relative to the base; and

providing a support device that supports an empty weight of the movable body, can move on the guiding surface according to movement of the movable body, and supports the movable body so that the movable body can overhang the guiding surface.

54. A movable body drive method, comprising:

supporting an empty weight of a movable body by a support device that can move; and

driving the movable body and also driving the support device according to movement of the movable body.

55. The movable body drive method according to claim 54, wherein

in the driving, the support device is driven so as to maintain support of the movable body.

56. The movable body drive method according to claim 54, wherein

in the driving, a first drive section that drives the movable body is moved together with the support device.

57. The movable body drive method according to claim 56, wherein

the driving is performed in a state where vibration transmission between the support device and the first drive section is prevented.

58. The movable body drive method according to claim 56, wherein

the support device and the first drive section are respectively placed on different members.

59. The movable body drive method according to claim 56, wherein

the driving is performed by providing a second drive section that moves the first drive section and moving the support device by movement of the first drive section.

60. The movable body drive method according to claim 56, wherein

the first drive section is connected to the support device, and

in the driving, the movable body moves in a noncontact state with the first drive section.

61. The movable body drive method according to claim 56, wherein

the first drive section is connected to the support device by using one of a mechanical method, a method using a static pressure of a gas, a magnetic method and an electromagnetic method.

62. The movable body drive method according to claim 54, wherein

a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device are provided, and

vibration transmission between the support device and the first and second drive sections is prevented.

63. The movable body drive method according to claim 62, wherein

in the driving, the first drive section and the support device are connected and the support device is moved by the second drive section via the first drive section.

64. The movable body drive method according to claim 54, wherein

a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device are provided, and

vibration transmission between the movable body and the first and second drive sections is prevented.

65. The movable body drive method according to claim 64, wherein

in the driving, the first drive section and the support device are connected and the support device is moved by the second drive section via the first drive section.

66. The movable body drive method according to claim 54, wherein

the movable body is moved in at least three degrees of freedom relative to the support device.

67. The movable body drive method according to claim 54, further comprising:

obtaining information regarding a position of the movable body relative to the support device, by a measurement device arranged between the movable body and the support device.

68. The movable body drive method according to claim 54, wherein

in the driving, the movable body and the drive device are mechanically coupled during acceleration of the movable body and the movable body and the drive device are in a noncontact state during constant speed movement of the movable body.

69. A pattern forming method of forming a pattern on an object, the method comprising:

driving a movable body that holds the object, by using the movable body drive method according to claim 54.

70. A device manufacturing method using the pattern forming method according to claim 69.

71. A movable body drive method, comprising:

supporting an empty weight of a movable body by a support device that can move; and

driving the movable body by movement of the support device and relative movement of the movable body and the support device.

72. The movable body drive method according to claim 71, wherein

in the driving, a first drive section that moves the movable body is moved together with the support device.

73. The movable body drive method according to claim 72, wherein

the driving is performed in a state where vibration transmission between the support device and the first drive section is prevented.

74. The movable body drive method according to claim 72, wherein

the support device and the first drive section are respectively placed on different members.

75. The movable body drive method according to claim 72, wherein

the driving is performed by providing a second drive section that moves the first drive section and moving the support device by movement of the first drive section.

76. The movable body drive method according to claim 72, wherein

the first drive section is connected to the support device, and

in the driving, the movable body moves in a noncontact state with the first drive section.

77. The movable body drive method according to claim 76, wherein

the first drive section is connected to the support device by using one of a mechanical method, a method using a static pressure of a gas, a magnetic method and an electromagnetic method.

78. The movable body drive method according to claim 71, wherein

a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device are provided, and

vibration transmission between the support device the first and second drive sections is prevented.

79. The movable body drive method according to claim 78, wherein

in the driving, the first drive section and the support device are connected and the support device is moved by the second drive section via the first drive section.

80. The movable body drive method according claim 71, wherein

a first drive section that relatively moves the movable body and the support device and a second drive section that moves the support device are provided, and

vibration transmission between the movable body and the first and second drive sections is prevented.

81. The movable body drive method according to claim 80, wherein

in the driving, the first drive section and the support device are connected and the support device is moved by the second drive section via the first drive section.

82. The movable body drive method according to claim 71, wherein

the movable body is moved in at least three degrees of freedom relative to the support device.

83. The movable body drive method according to claim 71, further comprising:

obtaining information regarding a position of the movable body relative to the support device, by a measurement device arranged between the movable body and the support device.

84. The movable body drive method according to claim 71, wherein

in the driving, the movable body and the drive device are mechanically coupled during acceleration of the movable body and the movable body and the drive device are in a noncontact state during constant speed movement of the movable body.

85. A pattern forming method of forming a pattern on an object, the method comprising:

driving a movable body that holds the object, by using the movable body drive method according to claim 71.

86. A device manufacturing method using the pattern forming method according to claim 85.

87. A movable body drive method, comprising:

supporting an empty weight of a movable body by a support device that can move; and

moving the support device on a guiding surface of a base, wherein

the movable body is supported by the support device so that the movable body can overhang the guiding surface.

88. The movable body drive method according to claim 87, wherein

the movable body is moved in a movement area larger than the guiding surface.

89. The movable body drive method according to claim 87, wherein

a projection area of the support device projected on the guiding surface is smaller than a projection area of the movable body projected on the guiding surface, in a support direction in which the support device supports the movable body.

90. The movable body drive method according to claim 87, further comprising:

forming a fluid bearing between the support device and the movable body and between the support device and the base.

91. The movable body drive method according to claim 87, further comprising:

driving the movable body in the support direction by the support device.

92. The movable body drive method according to claim 87, wherein

the movable body is moved in at least three degrees of freedom relative to the support device.

93. The movable body drive method according to claim 87, further comprising:

obtaining information regarding a position of the movable body relative to the support device, by a measurement device arranged between the movable body and the support device.

94. A pattern forming method of forming a pattern on an object, the method comprising:

driving a movable body that holds the object, by using the movable body drive method according to claim 87.

95. A device manufacturing method using the pattern forming method according to claim 94.