ROUGH STRUCTURE OF OPTOELECTRONIC DEVICE AND FABRICATION THEREOF

• US 20100019263A1
• Filed: 07/20/2009
• Published: 01/28/2010
• Est. Priority Date: 07/24/2008
• Status: Abandoned Application

• Current Assignee: Advanced Optoelectronic Technology, Inc.
• Original Assignee: Advanced Optoelectronic Technology, Inc.
• Inventors: TU, PO MIN, YEH, YING CHAO, LIN, WEN YU, WU, PENG YI, CHAN, SHIH HSIUNG, HUANG, SHIH CHENG
• Application Number:
  US12/505,711
• Publication Number:
  US 20100019263A1
• Time in Patent Office: Days
• US Class Current: 257/98
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/02494 Structure
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02573 Conductivity type
• CPC Class Codes: H01L 21/02587 Structure
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 33/025 Physical imperfections, e.g. particular concentration or distribution of impurities
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: H01L 33/32 containing nitrogen

Abstract

A dual-scale rough structure, in which a plurality of islands are grown on a semiconductor layer by heavily doping a dopant during epitaxy of a semiconductor layer of an optoelectronics device, is provided. A plurality of pin holes are formed on the islands by lowering the epitaxial temperature. The pin holes are distributed over the top and sidewall surfaces of the islands so that the total internal reflection within the optoelectronics device can be significantly reduced so as to enhance the brightness thereof. Compared with traditional technologies, the process method of the present invention has the advantages of producing less pollution, being able to perform easily, reducing manufactured cost, increasing the efficiency of light extraction, and increasing the effective area of the dual-scale emitting surface, which is not a smooth surface, of the structure.

Claims

1. A rough structure of an optoelectronic device, comprising:

a plurality of islands distributed over a semiconductor layer of an optoelectronic device; and

a plurality of pin holes distributed on the tops and sidewalls of said plurality of islands.

2. The rough structure of an optoelectronic device according to claim 1, wherein the scale of said island is in the range of from about 0.1 to about 10 μ

m.

3. The rough structure of an optoelectronic device according to claim 2, wherein the diameter of said pin hole is in the range of from about 10 to about 1000 nm, and the density of said plurality of pin holes is in the range of from about 10⁷ to about 10¹¹ cm⁻

2.

4. The rough structure of an optoelectronic device according to claim 3, wherein the scale of said pin hole is greater than or equal to one-eighth of the wavelength of the light from said optoelectronic device.

5. The rough structure of an optoelectronic device according to claim 2, wherein the scale ratio of said island to said pin hole is in the range of from about 1000:

1 to about 10;

1.

6. The rough structure of an optoelectronic device according to claim 1, wherein said plurality of pin holes are distributed on said semiconductor layer and between said plurality of islands.

7. The rough structure of an optoelectronic device according to claim 6, wherein said optoelectronic device is a light emitting diode.

8. A rough surface of an optoelectronic device, comprising:

a first rough surface formed on the surface of said optoelectronic device; and

a second rough surface formed on said first rough surface, wherein the scale of said second rough surface is greater than or equal to one eighth of the wavelength of the light from said optoelectronic device.

9. The rough surface of an optoelectronic device according to claim 8, wherein the scale ratio of said first rough surface to said second rough surface is in the range of from about 1000:

1 to about 10;

1.

10. The rough surface of an optoelectronic device according to claim 9, wherein the rough scale of said first rough surface is in the range of from about 0.1 to about 10 μ

m and the rough scale of said second rough surface is in the range of from about 10 to about 1000 nm.

11. The rough surface of an optoelectronic device according to claim 10, wherein said optoelectronic device is a light emitting diode.

12. The rough surface of an optoelectronic device according to claim 8, wherein said surface of said optoelectronic device, said first rough surface and said second rough surface are formed on P—

GaN, N—

GaN, P—

AlGaN, or N—

AlGaN layers.

13. A method for fabricating a rough structure of an optoelectronic device, comprising steps of:

forming a semiconductor layer;

heavily doping a dopant to form an island array on said semiconductor layer; and

decreasing an epitaxial temperature to form an array of pin holes, wherein the diameter of each pin hole is greater than or equal to one-eighth of the wavelength of the light from said optoelectronic device, and said array of pin holes is distributed randomly on the top and sidewall of said island array.

14. The method for fabricating a rough structure of an optoelectronic device according to claim 13, wherein the concentration of said dopant is in the range of from about 1×

10²⁰ to about 9.9×

10²² cm<sup>−

3</sup>.

15. The method for fabricating a rough structure of an optoelectronic device according to claim 14, wherein the temperature decrease at said step of decreasing an epitaxial temperature is in the range of from about 200°

C. to about 650°

C.

16. The method for fabricating a rough structure of an optoelectronic device according to claim 13, wherein said semiconductor layer, said island array, and said array of pin holes are made of P—

GaN, N—

GaN, P—

AlGaN, or N—

AlGaN.

17. The method for fabricating a rough structure of an optoelectronic device according to claim 15, wherein the fabricating temperature of said array of pin holes is in the range of from about 500°

C. to about 950°

C.

18. The method for fabricating a rough structure of an optoelectronic device according to claim 17, wherein the scale ratio of said island array to said array of pin holes is in the range of from about 1000:

1 to about 10;

1.

19. The method for fabricating a rough structure of an optoelectronic device according to claim 18, wherein the scale of said island array is in the range of from about 0.1 to about 10 μ

m;

the diameter of said pin hole is in the range of from about 10 to about 1000 nm, and the density of said pin holes is in the range of from about 10⁷ to about 10¹¹ cm<sup>−

2</sup>.

20. The method for fabricating a rough structure of an optoelectronic device according to claim 18, wherein said dopant includes Mg, Si, or a combination thereof.