MEMS DEVICES HAVING OVERLYING SUPPORT STRUCTURES AND METHODS OF FABRICATING THE SAME
First Claim
1. A method of fabricating an electromechanical device, comprising:
- providing a substrate;
depositing an electrode layer over the substrate;
depositing a sacrificial layer over the electrode layer;
patterning the sacrificial layer to form apertures;
depositing a movable layer over the sacrificial layer;
forming support structures overlying the movable layer and at least partially within apertures in the sacrificial layer; and
etching the sacrificial layer to remove the sacrificial layer, thereby forming a cavity between the movable layer and the electrode layer.
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Accused Products
Abstract
Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.
110 Citations
40 Claims
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1. A method of fabricating an electromechanical device, comprising:
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providing a substrate; depositing an electrode layer over the substrate; depositing a sacrificial layer over the electrode layer; patterning the sacrificial layer to form apertures; depositing a movable layer over the sacrificial layer; forming support structures overlying the movable layer and at least partially within apertures in the sacrificial layer; and etching the sacrificial layer to remove the sacrificial layer, thereby forming a cavity between the movable layer and the electrode layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification