DEVICE FOR MEASURING CELLULAR POTENTIAL, SUBSTRATE USED FOR THE SAME AND METHOD OF MANUFACTURING SUBSTRATE FOR DEVICE FOR MEASURING CELLULAR POTENTIAL
First Claim
1. A substrate for a device for measuring cellular potential, comprising:
- a single crystal plate including a first surface and a second surface facing the first surface, and having a diamond structure with (100) plane orientation;
wherein the first surface is provided with a depression, a through-hole is formed from the depression to the second surface, and the depression has an inner wall extending from an opening of the through-hole to an outer periphery, curving and being connected to the first surface.
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Accused Products
Abstract
A device for measuring cellular potential includes a substrate, a first electrode tank, a first electrode, a second electrode tank and a second electrode. The first electrode tank and the second electrode tank are disposed on the upper side and lower side of the substrate, respectively. The first electrode is disposed inside the first electrode tank and the second electrode is disposed inside the second electrode tank. The substrate includes a single crystal plate having a diamond structure with (100) plane orientation or (110) plane orientation. The substrate has a first surface provided with a depression and a second surface facing this first surface. From the depression to the second surface, a through-hole is formed. The depression has an inner wall extending from the opening of the through-hole to the outer periphery, curving and being connected to the first surface.
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Citations
23 Claims
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1. A substrate for a device for measuring cellular potential, comprising:
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a single crystal plate including a first surface and a second surface facing the first surface, and having a diamond structure with (100) plane orientation; wherein the first surface is provided with a depression, a through-hole is formed from the depression to the second surface, and the depression has an inner wall extending from an opening of the through-hole to an outer periphery, curving and being connected to the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A substrate for a device for measuring cellular potential, comprising:
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a single crystal plate including a first surface and a second surface facing the first surface, and having a diamond structure with (110) plane orientation; wherein the first surface is provided with a depression, a through-hole is formed from the depression to the second surface, and the depression has an inner wall extending from an opening of the through-hole to an outer periphery, curving and being connected to the first surface. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method of manufacturing a substrate for a device for measuring cellular potential, the method comprising:
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forming a resist mask having a mask hole on a first surface of a single crystal plate, the single crystal plate including the first surface and a second surface facing the first surface and having any one of a diamond structure with (100) plane orientation and a diamond structure with (110) plane orientation by using a photo mask; forming a depression on the first surface by dry etching; and providing a through-hole having a same diameter as that of the mask hole, the through-hole being allowed to penetrate the single crystal plate from the depression to the second surface by dry etching. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification