WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE
First Claim
1. A device, comprising:
- a device wafer having a circuit component formed thereon; and
a cap wafer bonded to said device wafer;
said cap wafer having a cavity therein, said cavity having a width and height such that an impedance of a transmission line is dependent upon said width and height of said cavity;
said cavity having a volume, the volume substantially enclosing said circuit component formed on said device wafer.
1 Assignment
0 Petitions
Accused Products
Abstract
A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.
15 Citations
83 Claims
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1. A device, comprising:
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a device wafer having a circuit component formed thereon; and a cap wafer bonded to said device wafer; said cap wafer having a cavity therein, said cavity having a width and height such that an impedance of a transmission line is dependent upon said width and height of said cavity; said cavity having a volume, the volume substantially enclosing said circuit component formed on said device wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A device, comprising:
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a device wafer having a center conductor formed thereon; and a cap wafer bonded to said device wafer; said cap wafer having a cavity therein, said cavity having a width and height; said center conductor having a width such that an impedance of a transmission line is dependent upon said width of said center conductor. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A device, comprising:
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a device wafer having a circuit component formed thereon and having vias formed therein; and a cap wafer bonded to said device wafer; said cap wafer having a cavity therein, said cavity having a post formed therein; said post being positioned to mechanically support said vias formed in said device wafer; said cavity having a volume, the volume substantially enclosing said circuit component formed on said device wafer. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40)
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41. A MEMS switch, comprising:
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a device wafer having a MEMS component formed thereon and having vias formed therein; a cap wafer bonded to said device wafer; and a conductor bonded to said vias; said cap wafer having a cavity therein, said cavity having a post formed therein; said post being positioned to mechanically support said vias formed in said device wafer; said cavity having a volume, the volume substantially enclosing said MEMS component formed on said device wafer. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A device, comprising:
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a device wafer having a circuit component formed thereon; a first cap wafer bonded to a first side of said device wafer; and a second cap wafer bonded to a second side of said device wafer; said first cap wafer having a first cap wafer cavity therein, said first cap wafer cavity having a width and height such that an impedance of a transmission line is dependent upon said width and height of said first cap wafer cavity; said second cap wafer having a second cap wafer cavity therein. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60)
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61. A device, comprising:
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a device wafer having a center conductor formed thereon; a first cap wafer bonded to a first side of said device wafer; and a second cap wafer bonded to a second side of said device wafer; said first cap wafer having a first cap wafer cavity therein, said first cap wafer cavity having a width and height; said center conductor having a width such that an impedance of a transmission line is dependent upon said width of said center conductor; said second cap wafer having a second cap wafer cavity therein. - View Dependent Claims (62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72)
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73. A device, comprising:
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a device wafer having a circuit component formed thereon and having vias formed therein; a first cap wafer bonded to a first side of said device wafer; and a second cap wafer bonded to a second side of said device wafer; said first cap wafer having a first cap wafer cavity therein, said first cap wafer cavity having a post formed therein; said second cap wafer having a second cap wafer cavity therein, said second cap wafer cavity having a post formed therein; said post in said first cap wafer cavity being positioned to mechanically support said vias formed in said device wafer; said post in said second cap wafer cavity being positioned to mechanically support said vias formed in said device wafer; said first cap wafer cavity having a volume, the volume substantially enclosing said circuit component formed on said device wafer. - View Dependent Claims (74, 75, 76, 77, 78, 79, 80, 81, 82, 83)
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Specification