DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

• US 20100019996A1
• Filed: 06/17/2009
• Published: 01/28/2010
• Est. Priority Date: 07/24/2008
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: JEONG, Ki-Hun, YOON, Kap-Soo, JO, Gug-Rae, CHOI, Jae-Ho, YANG, Sung-Hoon, YOU, Chun-Gi, SHIM, Seung-Hwan
• Granted Patent: US 8,822,995 B2
• Time in Patent Office: Days
• US Class Current: 345/76
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1251 comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs

Abstract

A display substrate includes a switching transistor electrically connected to a gate line and a data line, the data line extending in a first direction substantially perpendicular to the gate line extending in a second direction, the switching transistor including a switching active pattern comprising amorphous silicon, a driving transistor electrically connected to a driving voltage line and the switching transistor, the driving voltage line extended in the first direction, the driving transistor including a driving active pattern comprising a metal oxide; and a light-emitting element electrically connected to the driving transistor.

Claims

1. A display substrate comprising:

a switching transistor electrically connected to a gate line and a data line, the data line extending in a first direction substantially perpendicular to the gate line extending in a second direction, the switching transistor including a switching active pattern comprising amorphous silicon;

a driving transistor electrically connected to a driving voltage line and the switching transistor, the driving voltage line extended in the first direction, the driving transistor including a driving active pattern comprising a metal oxide; and

a light-emitting element electrically connected to the driving transistor.

2. The display substrate of claim 1, wherein the metal oxide comprises at least one of gallium (Ga), indium (In), tin (Sn) or zinc (Zn).

3. The display substrate of claim 2, wherein the metal oxide comprises gallium indium zinc oxide or indium gallium tin oxide.

4. The display substrate of claim 2, wherein the metal oxide comprises at least one of lithium (Li), beryllium (Be), sodium (Na), magnesium (Mg), calcium (Ca), scandium (Sc), titanium (Ti), vanadium (V), manganese (Mn), iron (Fe), nickel (Ni), copper (Cu), yttrium (Y), zirconium (Zr), niobium (Nb), ruthenium (Ru), palladium (Pd), cadmium (Cd), tantalum (Ta), tungsten (W), boron (B), carbon (C), nitrogen (N), fluorine (F), aluminum (Al), silicon (Si), phosphorus (P) or germanium (Ge).

5. The display substrate of claim 1, wherein the driving transistor comprises:

a driving control electrode formed by patterning a first conductive layer formed on a substrate;

a driving input electrode formed by patterning a second conductive layer formed on a substrate including the first conductive layer, the driving input electrode being connected to the driving voltage line; and

a driving output electrode formed by patterning the second conductive layer, the driving output electrode being spaced apart from the driving input electrode.

6. The display substrate of claim 5, wherein the switching transistor comprises:

a switching control electrode formed by patterning the first conductive layer, the switching control electrode being connected to the gate line;

a switching input electrode formed by patterning the second conductive layer, the switching input electrode being connected to the data line; and

a switching output electrode formed by patterning the second conductive layer, the switching output electrode being spaced apart from the switching input electrode, and the switching output electrode being connected to the driving control electrode.

7. The display substrate of claim 5, wherein the switching transistor comprises:

a switching input electrode formed by patterning the first conductive layer, the switching input electrode being connected to the data line;

a switching output electrode formed by patterning the first conductive layer, the switching output electrode being connected to the driving control electrode; and

a switching control electrode formed by patterning a third conductive layer formed on the substrate including the second conductive layer, the switching control electrode being connected to the gate line.

8. The display substrate of claim 1, wherein the driving transistor comprises:

a diving input electrode formed by patterning a first conductive layer, the driving input electrode being connected to the driving voltage line;

a driving output electrode formed by patterning the first conductive layer, the driving output electrode being spaced apart from the driving input electrode; and

a driving control electrode formed by patterning a second conductive layer formed on a substrate including the first conductive layer.

9. The display substrate of claim 8, wherein the switching transistor comprises:

a switching input electrode formed by patterning the first conductive layer, the switching input electrode being connected to the data line;

a switching output electrode formed by patterning the first conductive layer, the switching output electrode being spaced apart from the switching input electrode; and

a switching control electrode formed by patterning the second conductive layer, the switching control electrode being connected to the gate line.

10. The display substrate of claim 8, wherein the switching transistor comprises:

a switching control electrode formed by patterning a third conductive layer formed under the first conductive layer, the switching control electrode being connected to the gate line;

a switching input electrode formed by patterning the first conductive layer, the switching input electrode being connected to the data line; and

a switching output electrode formed by patterning the first conductive layer, the switching output electrode being spaced apart from the switching input electrode.

11. The display substrate of claim 8, wherein the switching transistor comprises:

a switching control electrode formed by patterning the first conductive layer, the switching control electrode being connected to the gate line;

a switching input electrode formed by patterning the second conductive layer, the switching input electrode being connected to the data line; and

a switching output electrode formed by patterning the second conductive layer, the switching output electrode being spaced apart from the switching input electrode.

12. The display substrate of claim 11, wherein the driving input electrode is spaced apart from the driving voltage line, and the driving input electrode is electrically connected to the driving voltage line by a connection electrode formed by patterning a fourth conductive layer formed on the second conductive layer.

13. The display substrate of claim 1, wherein the switching active pattern comprises:

a first pattern comprising the metal oxide; and

a second pattern formed on the first pattern, the second pattern comprising the amorphous silicon.

14. The display substrate of claim 13, wherein the driving transistor comprises:

a first driving control electrode formed by patterning a first conductive layer formed to the gate line;

a driving input electrode formed by patterning a second conductive layer formed to the data line; and

a driving output electrode formed by patterning the second conductive layer, the driving output electrode spaced apart from the driving input electrode.

15. The display substrate of claim 14, wherein the switching transistor comprises:

a switching control electrode formed by patterning the first conductive layer, the switching control electrode connected to the gate line;

a switching input electrode formed by patterning the second conductive layer, the switching input electrode connected to the data line; and

a switching output electrode formed by patterning the second conductive layer, the switching output electrode spaced apart from the switching input electrode and connected to the first driving control electrode.

16. The display substrate of claim 15, wherein a shape of the first pattern is the same as a shape of the second pattern, and the second pattern is exposed between the switching input electrode and the switching output electrode.

17. The display substrate of claim 14, wherein the driving transistor is formed by patterning a third conductive layer and connected to the switching transistor, and

the driving transistor further comprises a second control electrode facing the first control electrode.

18. The display substrate of claim 17, wherein the light-emitting element comprises:

an anode formed by patterning the third conductive layer and connected to the driving output electrode;

a cathode facing the anode; and

a light-emitting layer interposed between the anode and the cathode.

19. A method of manufacturing a display substrate, the method comprising:

forming a first conductive pattern including a gate line and a first switching control electrode connected to the gate line;

forming a second conductive pattern including a data line extending in a first direction substantially perpendicular to the gate line extending in a second direction, a driving voltage line, a switching input electrode connected to the data line, a switching output electrode spaced apart from the switching output electrode, a driving input electrode connected to the driving voltage line, and a driving output electrode spaced apart from the driving input electrode;

forming a switching active pattern and a driving active pattern, the switching active pattern comprising amorphous silicon is formed in a region corresponding to the switching control electrode, the driving active pattern comprising a metal oxide is formed in a region corresponding to the first driving control electrode; and

forming a light-emitting element electrically connected to the driving output electrode.

20. The method of claim 19, wherein the second conductive pattern is formed on a substrate including a first conductive pattern.

21. The method of claim 20, wherein forming the driving active pattern comprises:

forming a first active layer and a second active layer on the base substrate including the first conductive pattern, the first active layer comprising the metal oxide, the second active layer comprising the amorphous silicon;

forming a photoresist pattern on the second active layer, the photoresist pattern including a first thickness portion corresponding to the switching control electrode, and a second thickness portion corresponding to the first driving control electrode is thinner than the first thickness portion; and

patterning the first and second active layers using the photoresist pattern.

22. The method of claim 21, wherein patterning the first and second active layers comprises:

patterning the first and second active layers using the photoresist pattern to form a first pattern, a second pattern, the driving active pattern and a third pattern, wherein the first pattern is disposed on the switching control electrode and comprises the metal oxide, the second pattern is disposed on the first pattern and comprises the amorphous silicon, and the third pattern is formed on the driving active pattern and comprises the amorphous silicon;

removing the second thickness portion to form a residual pattern exposing the third pattern; and

removing the third pattern to expose the driving active pattern.

23. The method of claim 20, wherein forming the light-emitting element further comprises:

forming a third conductive layer on the second conductive pattern; and

patterning the third conductive layer to form a second driving control electrode overlapping the driving input electrode and the driving output electrode.

24. The method of claim 23, wherein forming the light-emitting element comprises:

patterning the third conductive layer to form an anode electrically connected to the driving output electrode;

forming a light-emitting layer on the anode; and

forming a cathode on the light-emitting layer.

25. The method of claim 24, further comprising:

forming an insulation layer between the second conductive pattern and the light-emitting element, the insulation layer including a first contact hole, a second contact hole and a groove,

wherein the driving output electrode is connected to the light-emitting element through the first contact hole, the driving output electrode is connected to the second control electrode, and the groove is formed in a region corresponding to the first driving control electrode.

26. The method of claim 19, wherein the first conductive pattern is formed on a substrate including a second conductive pattern.

27. The method of claim 19, wherein the driving active pattern is formed on the driving input electrode and the driving output electrode.

28. A method of manufacturing a display substrate, the method comprising:

forming a first conductive pattern including a gate line and a switching control electrode connected to the gate line;

forming a second conductive pattern including a data line crossing the gate line, a driving voltage line, a switching input electrode connected to the data line, a switching output electrode spaced apart from the switching input electrode, a driving input electrode connected to the driving voltage line, and a driving output electrode spaced apart from the driving input electrode;

forming a third conductive pattern including a driving control electrode, the driving control electrode formed in a region between the driving input electrode and the driving output electrode;

forming a switching active pattern comprising amorphous silicon, the switching active pattern formed in a region corresponding to the switching control electrode;

forming a driving active pattern comprising a metal oxide, the driving active pattern formed in a region corresponding to the driving control electrode; and

forming a light-emitting element electrically connected to the driving output electrode.

29. The method of claim 28, wherein the second conductive pattern is formed on a base substrate including the first conductive pattern.

30. A method of manufacturing a display substrate, the method comprising:

forming a first conductive pattern including a gate line, a switching control electrode connected to the gate line, a driving input electrode, and a driving output electrode;

forming a second conductive pattern including a data line extending in a first direction substantially perpendicular to the gate line extending in a second direction, a voltage line spaced apart from the driving input electrode, a switching input electrode connected to the data line, and a switching output electrode spaced apart from the switching input electrode;

forming a switching active pattern comprising amorphous silicon, the switching active pattern formed in a region corresponding to the switching control electrode;

forming a driving active pattern comprising a metal oxide, the driving active pattern formed in a region corresponding to the driving control electrode; and

forming a light-emitting element electrically connected to the driving output electrode.

31. The method of claim 30, wherein forming the light-emitting element comprises:

patterning a third conductive layer to form an anode and a connection electrode, the connection electrode electrically connecting the driving voltage line and the driving input electrode.