Integrated quartz biological sensor and method
First Claim
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1. An apparatus comprising:
- a mass detector disposed within a cavity to detect a sample; and
an optical Surface Enhanced Raman Spectroscopy (SERS) detector disposed within said cavity to detect said sample.
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Abstract
The present disclosure relates to the integration of optical spectroscopy onto a nanoresonator for a sensitive means of selectively monitoring biological molecules. An apparatus and a method are provided for making an apparatus that is a sensor in which both mass detection using a quartz nanoresonator and optical detection using SERS is integrated onto at least one chip, thereby providing redundancy in detection of a species.
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Citations
20 Claims
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1. An apparatus comprising:
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a mass detector disposed within a cavity to detect a sample; and an optical Surface Enhanced Raman Spectroscopy (SERS) detector disposed within said cavity to detect said sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 19)
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9. A method for fabricating a sensor comprising the steps of:
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providing a quartz substrate; providing at least one electrode and at least one tuning pad to the quartz substrate; providing a silicon handle wafer having a cavity etched therein; bonding the silicon handle wafer to the quartz substrate; thinning the quartz substrate; metallizing the quartz substrate; providing a silicon base wafer; providing a diffraction grating to the silicon base wafer; metallizing the silicon base wafer; bonding the quartz substrate to the silicon base wafer and subsequently removing the silicon handle wafer, thereby producing a resonator; removing quartz from the resonator thus obtaining a modified resonator; providing a cap silicon wafer having a cavity etched therein; providing a vertical cavity surface emitting laser (VCSEL) on the cap wafer; providing an integrated beamsplitter and lens assembly to the top surface of the cap wafer; providing a lens to the top surface of the cap silicon wafer; providing a detector array on the cavity of the cap wafer; inverting the cap wafer, and bonding the inverted cap wafer to the modified resonator. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 20)
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Specification