GIMBALED SCANNING MICRO-MIRROR ACTUATION SCHEME AND ARCHITECTURE

• US 20100020379A1
• Filed: 04/10/2007
• Published: 01/28/2010
• Est. Priority Date: 12/03/2006
• Status: Active Grant

• Current Assignee: Maradin Ltd.
• Original Assignee: Maradin Technologies Ltd.
• Inventors: Lubianiker, Yoram
• Granted Patent: US 8,508,098 B2
• Time in Patent Office: Days
• US Class Current: 359/224.100
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129

Abstract

A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.

Claims

1. A micro-electro-mechanical system device for actuating a gimbaled element, the device comprising:

(a) an electromagnetic actuator for actuating a first angular degree of freedom (DOF) of rotation about the vertical axis; and

(b) an electrostatic actuator for actuating the second angular DOF of rotation about the horizontal axis, wherein said horizontal axis and said vertical axis are orthogonal and coplanar.

2. The device of claim 1, wherein said electromagnetic actuator has a symmetric structure, thereby actuating forces produced by said electromagnetic actuator, create only a rotational movement of said first DOF about said vertical axis.

3. The device of claim 2, wherein said electromagnetic actuator, excites negligible residual actuation force on said second DOF.

4. The device of claim 1, wherein said electrostatic actuator, uses electrostatic fringing fields, thereby creating an actuation force.

5. The device of claim 4, wherein said electrostatic actuator has a symmetric structure, thereby actuating forces produced by said electrostatic actuator, create only a rotational movement of said second DOF about said horizontal axis.

6. The device of claim 5, wherein said electrostatic actuator, excites negligible residual actuation force on said first DOF.

7. The device of claim 1, wherein there is no electrical potential difference between both sides of the structural material of said electrostatic actuator.

8. The device of claim 1, wherein said electromagnetic actuator comprises:

(a) external fixed electromagnet coils; and

(b) internal rotating magnets.

9. The device of claim 8, wherein said rotating magnets are affixed to said vertical axis and actuated by said electromagnet coils.

10. The device of claim 8, wherein one or more of said electromagnetic actuators can be used on each side of said vertical axis.

11. The device of claim 1, wherein said electrostatic actuator, actuates said second degree of freedom in the horizontal scan direction.

12. The device of claim 1, wherein said electromagnetic actuator, actuates said first degree of freedom in the vertical scan direction.

13. The device of claim 2, wherein said electromagnetic actuator, has a linear electromechanical response.

14. The device of claim 4, wherein said electromagnetic actuator, has a sinusoidal electromechanical response.

15. The device of claim 1, wherein said electrostatic actuator, comprises a frequency sensor with high signal to noise ratio.

16. A method of manufacturing the device of claim 1, the method comprising a 3-masks Silicon-On-Insulator (SOI) fabrication process.