THERMAL ACTUATOR FOR AN INFRARED SENSOR
First Claim
1. A device, comprising:
- a substrate;
a first flexible beam connected between two anchors supported on the substrate; and
a plate mechanically coupled to the first flexible beam and adapted to absorb incident radiation, wherein;
the plate is adapted to transfer heat generated due to said absorption to the first flexible beam to cause the first flexible beam to deform and move the plate with respect to the substrate; and
the first flexible beam and at least a portion of each of the two anchors have been formed from a common layer of material.
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0 Petitions
Accused Products
Abstract
In one embodiment, an infrared (IR) sensor has a flexible beam connected between two anchors supported on a substrate. The beam is mechanically coupled to a plate that has an IR-absorbing layer and is adapted to transfer the IR-induced heat to the beam. The heat transfer causes the beam to deform and move the plate with respect to the substrate. The motion of the plate is detected electrically or optically to quantify the amount of IR radiation received by the plate. The beam, anchors, and plate are formed from a planar layer of material that is supported at a specified offset distance from the substrate. During fabrication, certain portions of the planar layer are removed to define the beam, anchors, and plate.
49 Citations
20 Claims
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1. A device, comprising:
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a substrate; a first flexible beam connected between two anchors supported on the substrate; and a plate mechanically coupled to the first flexible beam and adapted to absorb incident radiation, wherein; the plate is adapted to transfer heat generated due to said absorption to the first flexible beam to cause the first flexible beam to deform and move the plate with respect to the substrate; and the first flexible beam and at least a portion of each of the two anchors have been formed from a common layer of material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of detecting incident radiation, comprising:
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exposing a plate to the incident radiation, wherein the plate is adapted to absorb at least a portion of said radiation; transferring heat generated in the plate due to said absorption to a first flexible beam to cause the first flexible beam to deform and move the plate with respect to the substrate, wherein; the first flexible beam is connected between two anchors supported on a substrate; the plate is mechanically coupled to the first flexible beam; and the first flexible beam and at least a portion of each of the two anchors have been formed from a common layer of material; detecting said motion of the plate. - View Dependent Claims (18, 19, 20)
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Specification