METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING A MODEL BASED COLORING PROCESS FOR GEOMETRY DECOMPOSITION FOR USE IN A MULTIPLE EXPOSURE PROCESS
First Claim
Patent Images
1. A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process, said method comprising the steps of:
- (a) dividing a plurality of said features into a plurality of segments;
(b) determining the image log slope (ILS) value for each of said plurality of segments;
(c) determining the value of the gradient of the image log slope (ILS) value for each of said plurality of segments; and
(d) assigning a phase or color to said segments based on the values of the gradient of the image log slope of each of said plurality of segments.
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Abstract
A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process. The method includes
- the steps of: (a) dividing a plurality of the features into a plurality of segments; (b) determining the image log slope (ILS) value for each of the plurality of segments; (c) determining the value of the gradient of the image log slope (ILS) value for each of the plurality of segments; and (d) assigning a phase or color to the segments based on the values of the gradient of the image log slope of each of the plurality of segments.
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Citations
1 Claim
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1. A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process, said method comprising the steps of:
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(a) dividing a plurality of said features into a plurality of segments; (b) determining the image log slope (ILS) value for each of said plurality of segments; (c) determining the value of the gradient of the image log slope (ILS) value for each of said plurality of segments; and (d) assigning a phase or color to said segments based on the values of the gradient of the image log slope of each of said plurality of segments.
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Specification