SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE
First Claim
1. A method of testing humidity, comprising:
- determining a property of a device which encloses a plurality of interferometric modulators; and
determining a humidity value or a degree of the humidity inside the device based at least in part upon the determined property, wherein the determined property comprises at least one of i) the thickness and width of a seal of the device and ii) adhesive permeability of a component of the device.
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Accused Products
Abstract
One embodiment provides a method of testing humidity, comprising: i) determining a property of a device which encloses a plurality of interferometric modulators and ii) determining a relative humidity value or a degree of the relative humidity inside the device based at least in part upon the determined property, wherein the determined property comprises at least one of i) the thickness and width of a seal of the device and ii) adhesive permeability of a component of the device. In one embodiment, the determined property further comprises at least one of the following: i) temperature-humidity combination inside the device, ii) a desiccant capacity inside the device and iii) a device size.
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Citations
38 Claims
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1. A method of testing humidity, comprising:
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determining a property of a device which encloses a plurality of interferometric modulators; and determining a humidity value or a degree of the humidity inside the device based at least in part upon the determined property, wherein the determined property comprises at least one of i) the thickness and width of a seal of the device and ii) adhesive permeability of a component of the device. - View Dependent Claims (2, 3, 4, 5)
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6. A system for testing humidity, comprising:
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first means for determining a property of a device which encloses a plurality of interferometric modulators; and second means for determining a humidity value or a degree of the humidity inside the device based at least in part upon the determined property, wherein the determined property comprises at least one of i) the thickness and width of a seal of the device and ii) adhesive permeability of a component of the device. - View Dependent Claims (7, 8)
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9. A method of testing humidity, comprising:
providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant, wherein the desiccant is configured to change its color based on an amount of water vapor absorbed therein; determining a degree of a color change of the desiccant; and
determining a humidity value inside the device based at least in part upon the determined degree of the color change.- View Dependent Claims (10, 11, 12, 13)
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14. A method of manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
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providing a substrate; forming a plurality of interferometric modulators on the substrate; providing a desiccant configured to change its color based on an amount of water vapor absorbed therein; providing a backplate; and joining the substrate and the backplate so as to form a device which encloses the plurality of interferometric modulators and the desiccant, wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device, and wherein a humidity value inside the MEMS device is determined based at least in part upon the determined degree of the color change. - View Dependent Claims (15, 35)
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16. A microelectromechanical systems (MEMS) device, comprising:
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a substrate; a plurality of interferometric modulators formed on the substrate; a desiccant configured to change its color based on an amount of water vapor absorbed therein; and a backplate, wherein the substrate and backplate are joined to each other so as to form a device which encloses the plurality of interferometric modulators and the desiccant, wherein the backplate includes at least one transparent portion through which the color change of the desiccant can be viewed from the outside of the device, and wherein a humidity value inside the MEMS device is determined based at least in part upon the determined degree of the color change. - View Dependent Claims (17, 18)
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19. A method of testing humidity, comprising:
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measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor; comparing the weights of the first and second devices; and determining a humidity value or a degree of the humidity inside one of the two devices based at least in part upon the weight comparison. - View Dependent Claims (20, 21, 22, 23)
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24. A system for testing humidity, comprising:
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a first device enclosing a plurality of interferometric modulators; a second device enclosing a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor; and a scale configured to measure the weights of the first and second devices, wherein a humidity value or a degree of the humidity inside one of the two devices is determined based at least in part upon the measured weights. - View Dependent Claims (25, 26, 27)
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28. A method of testing humidity, comprising:
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providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant; measuring a first weight of the device; providing water vapor into the inside of the device; measuring a second weight of the device after the water vapor has been provided into the device; comparing the first and second weights; and determining a humidity value or a degree of the humidity inside the device based at least in part upon the weight comparison. - View Dependent Claims (29, 30, 31)
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32. A system for testing humidity, comprising:
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means for measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor; means for comparing the weights of the first and second devices; and means for determining a humidity value or a degree of the humidity inside one of the two devices based at least in part upon the weight comparison. - View Dependent Claims (33, 34)
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36. A system for testing humidity, comprising:
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means for providing a device which encloses i) a plurality of interferometric modulators and ii) a desiccant; means for measuring a first weight of the device; means for providing water vapor into the inside of the device; means for measuring a second weight of the device after the water vapor has been provided into the device; means for comparing the first and second weights; and means for determining a humidity value or a degree of the humidity inside the device based at least in part upon the weight comparison. - View Dependent Claims (37, 38)
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Specification