REACTIVE GAS DISTRIBUTOR, REACTIVE GAS TREATMENT SYSTEM, AND REACTIVE GAS TREATMENT METHOD
First Claim
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1. A reactive gas distributor for a reactive gas treatment system, comprising:
- a housing,a reactive gas inlet provided at one side of the housing and fluidly connectable to a remote plasma source, anda plurality of reactive gas outlets at another side of the housing and arranged in a pattern.
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Abstract
A reactive gas distributor for a reactive gas treatment system is provided, comprising a housing, a reactive gas inlet provided at one side of the housing and fluidly connectable to a remote plasma source, and a plurality of reactive gas outlets at another side of the housing and arranged in a pattern.
116 Citations
25 Claims
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1. A reactive gas distributor for a reactive gas treatment system, comprising:
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a housing, a reactive gas inlet provided at one side of the housing and fluidly connectable to a remote plasma source, and a plurality of reactive gas outlets at another side of the housing and arranged in a pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 10, 11, 12, 13, 14, 15)
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9. A reactive gas treatment system, comprising
a reactive gas treatment chamber, a reactive gas distributor and a remote plasma source, a reactive gas distributor being provided at the reactive gas treatment chamber, the reactive gas distributor comprising: -
a housing, a reactive gas inlet provided at one side of the housing and fluidly connected to the remote plasma source, and a plurality of reactive gas outlets at another side of the housing and arranged in a pattern.
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16. A reactive gas treatment method for treating a substrate with a reactive gas, comprising
providing a substrate in a reactive gas treatment chamber, producing a reactive gas in a remote plasma source, directing the reactive gas through a reactive gas distributor into the reactive gas treatment chamber, the reactive gas distributor having a plurality of reactive gas outlets arranged in a pattern, and treating the substrate with the reactive gas.
Specification