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REACTIVE GAS DISTRIBUTOR, REACTIVE GAS TREATMENT SYSTEM, AND REACTIVE GAS TREATMENT METHOD

  • US 20100025370A1
  • Filed: 08/04/2008
  • Published: 02/04/2010
  • Est. Priority Date: 08/04/2008
  • Status: Abandoned Application
First Claim
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1. A reactive gas distributor for a reactive gas treatment system, comprising:

  • a housing,a reactive gas inlet provided at one side of the housing and fluidly connectable to a remote plasma source, anda plurality of reactive gas outlets at another side of the housing and arranged in a pattern.

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