Interface device for wireless testing, semiconductor device and semiconductor package including the same, and method for wirelessly testing using the same
First Claim
Patent Images
1. An interface device for wireless testing comprising:
- an interface substrate;
coil shaped interface antennas on the interface substrate; and
interface transmitting and receiving circuits on the interface substrate electrically connected to the interface antennas via interface interconnections on the interface substrate, wherein the interface transmitting and receiving circuits are electrically connected to input/output pads of a semiconductor chip via interface vias passing through the interface substrate.
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Abstract
In an interface device for wireless testing capable of testing a semiconductor chip in a non-contact manner, a semiconductor device and a semiconductor package including the same, and a method for wirelessly testing a semiconductor device using the same are provided, the interface device for wireless testing includes an interface substrate, interface antennas on the interface substrate, and interface transmitting and receiving circuits on the interface substrate, wherein the interface transmitting and receiving circuits are electrically connected to input/output pads of a semiconductor chip via interface vias passing through the interface substrate.
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Citations
20 Claims
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1. An interface device for wireless testing comprising:
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an interface substrate; coil shaped interface antennas on the interface substrate; and interface transmitting and receiving circuits on the interface substrate electrically connected to the interface antennas via interface interconnections on the interface substrate, wherein the interface transmitting and receiving circuits are electrically connected to input/output pads of a semiconductor chip via interface vias passing through the interface substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor device comprising:
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a semiconductor chip at a wafer level; input/output pads on the semiconductor chip; and an interface device for wireless testing on the semiconductor chip, wherein the interface device comprises; an interface substrate; interface antennas on the interface substrate; and interface transmitting and receiving circuits on the interface substrate electrically connected to the interface antennas via interface interconnections on the interface substrate, wherein the interface transmitting and receiving circuits are electrically connected to the input/output pads of the semiconductor chip via interface vias, and the interface vias pass through the interface substrates. - View Dependent Claims (11, 12, 13, 14)
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15. A semiconductor package comprising:
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a semiconductor chip; input/output pads on the semiconductor chip; and an interface device for wireless testing formed on the semiconductor chip, wherein the interface device comprises; an interface substrate; interface antennas on the interface substrate; and interface transmitting and receiving circuits on the interface substrate electrically connected to the interface antennas via interface interconnections on the interface substrate, wherein the interface antennas are electrically connected to the input/output pins via bonding wires. - View Dependent Claims (16, 17)
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18. A semiconductor package comprising:
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a semiconductor chip; input/output pads on the semiconductor chip; and an interface device for wireless testing formed on the semiconductor chip, wherein the interface device comprises; an interface substrate; interface antennas on the interface substrate; and interface transmitting and receiving circuits on the interface substrate electrically connected to the interface antennas via interface interconnections on the interface substrate, wherein the interface antennas are electrically connected to external solder balls via bumps. - View Dependent Claims (19, 20)
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Specification