MICROMECHANICAL HOUSING COMPRISING AT LEAST TWO CAVITIES HAVING DIFFERENT INTERNAL PRESSURE AND/OR DIFFERENT GAS COMPOSITIONS AND METHOD FOR THE PRODUCTION THEREOF
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Abstract
The present application relates to a multiple component which is to be subsequently individualized by forming components containing active structures, in addition to a corresponding component which can be used in microsystem technology systems. The multiple component and/or component comprises a flat substrate and also a flat cap structure which are bound to each other such that they surround at least one first and one second cavity per component, which are sealed against each other and towards the outside. The first of the two cavities is provided with getter material and due to the getter material has a different internal pressure and/or a different gas composition than the second cavity. The present application also relates to a method for producing the type of component and/or components for which gas mixtures of various types of gas have a different absorption ratio in relation to the getter material.
73 Citations
73 Claims
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1-37. -37. (canceled)
- 38. A multiple component element intended to be subsequently individualized in order to form components containing active structures, said multiple component element comprises a flat substrate and also a flat cap structure which are connected to each other such that they surround at least one first cavity and at least one second cavity per component, which first and second cavities are sealed against each other and towards the outside, wherein at least a rotary rate sensor, accelerometer, actuator, resonator, display, digital micro-mirror, bolometer and/or RF-switch is placed in the first cavity and wherein the first of the first and second cavities is provided with getter material and due to said getter material has a different internal pressure and/or a different gas composition than the second cavity.
- 46. A flat substrate structure or flat formed cap structure to be used in a multiple component element intended to be subsequently individualized in order to form components containing active structures, the flat substrate or cap structure containing first regions, recesses or cavities and second regions, recesses or cavities such that cavities are formed that are sealed against each other when the substrate structure is bonded with a counter element to form the multiple component element, whereby at least in each of the first regions, recesses or cavities at least one of a rotary rate sensor, an accelerometer, an actuator, a resonator, a display, a digital micro-mirror, a bolometer and an R/F-switch is placed, wherein a first getter material is provided in the first regions, recesses or cavities and that at least one of no getter material and a second getter material with gas absorption characteristics different from those of the first getter material is provided in the second regions, recesses or cavities.
- 48. A component which can be used in Microsystems technology with a single substrate and a cap structure which are connected to each other such that they surround at least one first cavity and at least one second cavity, which first cavity and second cavity are sealed against each other and towards the outside, wherein at least one of a rotary rate sensor, an accelerometer, an actuator, a resonator, a display, a digital micro-mirror, a bolometer and an RF-switch is placed in the first cavity, and wherein the first of the first and second cavities is provided with getter material and due to the getter material the first of the first and second cavities has at least one of a different internal pressure and a different gas composition than the second cavity.
- 56. A single substrate or cap structure to be used in a Microsystems technology component, wherein the substrate or cap structure contains first recesses and cavities and second recesses and cavities, the first recesses/cavities containing a first getter material and the second recesses/cavities containing a second getter material with gas absorption characteristics different from those of the first getter material.
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58. A method for the production of a component comprising a substrate and also a cap structure which are connected to each other such that they surround at least one first cavity and at least one second cavity per component, comprising the steps of:
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providing a flat substrate which is coated within the regions of the first cavity with a first getter material, or a similarly characterized and if applicable flat formed cap structure; aligning the substrate or the cap structure with a respective cap or substrate counterpart; positioning the paired substrate and the cap structure into a production chamber; flushing the production chamber with a production gas comprising a first gas which can be absorbed by the first getter material, and of a second gas which cannot be absorbed or can be absorbed to a substantially lesser degree by the first getter material, where the first gas has partial pressure PA and the second gas has partial pressure PB and where partial pressure PB may be zero; putting the cap structure and the substrate into contact with one another and bonding both parts together; and activation of the first getter material such that it absorbs molecules of the first gas. - View Dependent Claims (59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73)
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Specification