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TEST APPARATUS AND PROBE CARD

  • US 20100026333A1
  • Filed: 07/27/2009
  • Published: 02/04/2010
  • Est. Priority Date: 01/29/2007
  • Status: Active Grant
First Claim
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1. A test apparatus for testing a device under test, comprising:

  • a test head that communicates a signal with the device under test and tests the device under test;

    a prober on which the device under test is mounted; and

    a probe card that is positioned between the test head and the prober and that transfers a signal between the test head and the device under test, whereinthe test head includes a plurality of test head pins on a surface of the test head facing the probe card, the plurality of test head pins being electrically connected to the probe card,the probe card includes;

    a plurality of probe pins that are provided on a surface of the probe card facing the prober and that are electrically connected to a terminal of the device under test;

    a plurality of test head pads that are provided on a surface of the probe card facing the test head and that are electrically connected to the test head pins and to the probe pins; and

    prober pads that are provided on a surface of the probe card facing the prober and that are electrically connected to the probe pins, andthe prober includes;

    a prober connection section that is provided on a surface of the prober facing the probe card and that is electrically connected to the prober pads; and

    a transfer path that transfers a signal between the test head and the prober connection section.

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