TEST APPARATUS AND PROBE CARD
First Claim
1. A test apparatus for testing a device under test, comprising:
- a test head that communicates a signal with the device under test and tests the device under test;
a prober on which the device under test is mounted; and
a probe card that is positioned between the test head and the prober and that transfers a signal between the test head and the device under test, whereinthe test head includes a plurality of test head pins on a surface of the test head facing the probe card, the plurality of test head pins being electrically connected to the probe card,the probe card includes;
a plurality of probe pins that are provided on a surface of the probe card facing the prober and that are electrically connected to a terminal of the device under test;
a plurality of test head pads that are provided on a surface of the probe card facing the test head and that are electrically connected to the test head pins and to the probe pins; and
prober pads that are provided on a surface of the probe card facing the prober and that are electrically connected to the probe pins, andthe prober includes;
a prober connection section that is provided on a surface of the prober facing the probe card and that is electrically connected to the prober pads; and
a transfer path that transfers a signal between the test head and the prober connection section.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a test apparatus including a test head main body 130 that communicates a signal with the device under test 200, a prober 110 on which the device under test 200 is mounted, and a probe card 300 positioned between the test head main body 130 and the prober 110, where the probe card 300 includes: a plurality of probe pins 320 provided on a surface thereof facing the prober 110 and electrically connected to a terminal of the device under test 200; a plurality of test head pads 330 provided on a surface thereof facing the test head main body 130 and electrically connected to spring pins 129 on the test head main body 130 and to the probe pins 320; and prober pads 340 provided on a surface thereof facing the prober 110 and electrically connected to the plurality of probe pins 320.
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Citations
8 Claims
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1. A test apparatus for testing a device under test, comprising:
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a test head that communicates a signal with the device under test and tests the device under test; a prober on which the device under test is mounted; and a probe card that is positioned between the test head and the prober and that transfers a signal between the test head and the device under test, wherein the test head includes a plurality of test head pins on a surface of the test head facing the probe card, the plurality of test head pins being electrically connected to the probe card, the probe card includes;
a plurality of probe pins that are provided on a surface of the probe card facing the prober and that are electrically connected to a terminal of the device under test;
a plurality of test head pads that are provided on a surface of the probe card facing the test head and that are electrically connected to the test head pins and to the probe pins; and
prober pads that are provided on a surface of the probe card facing the prober and that are electrically connected to the probe pins, andthe prober includes;
a prober connection section that is provided on a surface of the prober facing the probe card and that is electrically connected to the prober pads; and
a transfer path that transfers a signal between the test head and the prober connection section. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A probe card provided between a test head and a prober within a test apparatus that tests a device under test, the test head communicating a signal with the device under test and testing the device under test, and the prober having the device under test mounted thereon,
the probe card transferring a signal between the test head and the device under test and comprising: -
a plurality of probe pins that are provided on a surface of the probe card facing the prober and that are electrically connected to a terminal of the device under test; a plurality of test head pads that are provided on a surface of the probe card facing the test head and that are electrically connected to test head pins on the test head and to the probe pins; and prober pads provided on a surface of the probe card facing the prober, electrically connected to a prober connection section on the prober, electrically connected to the test head via a transfer path, and electrically connected to the probe pins, where the transfer path connects the prober connection section to the test head.
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Specification