Method of forming carbon film, method of manufacturing magnetic recording medium, and apparatus for forming carbon film

• US 20100028563A1
• Filed: 07/20/2009
• Published: 02/04/2010
• Est. Priority Date: 07/23/2008
• Status: Abandoned Application

• Current Assignee: Showa Denko HD Singapore Pte Limited (Resonac Holdings Corp.)
• Original Assignee: Showa Denko HD Singapore Pte Limited (Resonac Holdings Corp.)
• Inventors: OTA, Ichiro
• Application Number:
  US12/505,919
• Publication Number:
  US 20100028563A1
• Time in Patent Office: Days
• US Class Current: 427/580
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: C23C 16/503 using dc or ac discharges
• CPC Class Codes: G11B 5/8408 protecting the magnetic layer

Abstract

The present invention provides a carbon film forming method capable of forming a dense carbon film with high hardness. The carbon film forming method includes: introducing a raw material gas G including carbon into a deposition chamber 101 whose internal pressure is reduced; ionizing the raw material gas G using a discharge between a filament-shaped cathode electrode 104 heated by electrical power and an anode electrode 105 provided around the cathode electrode; and accelerating and radiating the ionized gas to the surface of a substrate D. A magnetic field is applied by a permanent magnet 109 to increase the ion density of the ionized gas accelerated and radiated to the surface of the substrate D. In this way, it is possible to form a carbon film with high hardness and high density on the surface of the substrate D.

Claims

1. A method of forming a carbon film, comprising:

introducing a raw material gas including carbon into a deposition chamber whose internal pressure is reduced;

ionizing the gas using a discharge between a filament-shaped cathode electrode heated by electrical power and an anode electrode provided around the cathode electrode; and

accelerating and radiating the ionized gas to the surface of a substrate to form the carbon film on the surface of the substrate,

wherein a magnetic field is applied in a region in which the raw material gas is ionized or a region in which the ionized gas is accelerated.

2. The method of forming a carbon film according to claim 1,

wherein the magnetic field is applied by a permanent magnet that is provided around the cathode electrode and the anode electrode.

3. The method of forming a carbon film according to claim 1,

wherein the magnetic field is applied such that a direction in which the ionized gas is accelerated is substantially parallel to the direction of the magnetic field lines of the permanent magnet.

4. The method of forming a carbon film according to claim 1,

wherein there is a potential difference between the cathode electrode or the anode electrode and the substrate, and

the ionized gas is radiated to the surface of the substrate while being accelerated.

5. A method of manufacturing a magnetic recording medium, comprising:

forming a carbon film on a non-magnetic substrate having at least a magnetic layer formed thereon, using the method of forming the carbon film according to claim 1.

7. The method of forming a carbon film according to claim 2,

wherein the magnetic field is applied such that a direction in which the ionized gas is accelerated is substantially parallel to the direction of the magnetic field lines of the permanent magnet.

8. The method of forming a carbon film according to claim 2,

wherein there is a potential difference between the cathode electrode or the anode electrode and the substrate, and

the ionized gas is radiated to the surface of the substrate while being accelerated.

9. A method of manufacturing a magnetic recording medium, comprising:

forming a carbon film on a non-magnetic substrate having at least a magnetic layer formed thereon, using the method of forming the carbon film according to claim 2.

6. An apparatus for forming a carbon film comprising:

a deposition chamber whose internal pressure can be reduced;

a holder that holds a substrate in the deposition chamber;

an introduction pipe that introduces a raw material gas including carbon into the deposition chamber;

a filament-shaped cathode electrode that is provided in the deposition chamber;

an anode electrode that is provided around the cathode electrode in the deposition chamber;

a first power supply that supplies electrical power to heat the cathode electrode;

a second power supply that generates a discharge between the cathode electrode and the anode electrode;

a third power supply that generates a potential difference between the cathode electrode or the anode electrode and the substrate; and

a permanent magnet that applies a magnetic field between the cathode electrode and the anode electrode or the substrate.