×

MEMS PROBE FABRICATION ON A REUSABLE SUBSTRATE FOR PROBE CARD APPLICATION

  • US 20100033201A1
  • Filed: 08/05/2008
  • Published: 02/11/2010
  • Est. Priority Date: 08/05/2008
  • Status: Active Grant
First Claim
Patent Images

1. A method comprising:

  • forming a probe on a substrate using Micro-Electro-Mechanical Systems (MEMS) processing techniques, the probe having a bonding surface to be attached to an application platform of a probe card, the bonding surface formed on a plane perpendicular to a surface of the substrate; and

    forming an undercut beneath the probe for detachment of the probe from the substrate.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×