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Microwave plasma reactors

  • US 20100034984A1
  • Filed: 06/16/2009
  • Published: 02/11/2010
  • Est. Priority Date: 06/16/2008
  • Status: Active Grant
First Claim
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1. A microwave plasma assisted reactor comprising:

  • (a) a first microwave chamber having a reference plane at a reference axial location Z0, the first microwave chamber comprising an electromagnetic wave source and extending in an axial direction z>

    Z0;

    (b) a plasma chamber having an outer wall, the plasma chamber extending into the first microwave chamber such that at least a portion of the plasma chamber is located at z>

    Z0 and at least a portion of the plasma chamber is located at z<

    Z0;

    (c) a conductive stage having a reference surface extending into the plasma chamber and defining a second microwave chamber in the plasma chamber (i) at z<

    Z0 and (ii) between the plasma chamber outer wall and the conductive stage;

    (d) a conducting short disposed in the second microwave chamber and in electrical contact with the plasma chamber outer wall and the conductive stage, the axial distance between the conducting short and Z0 being L2, and the axial distance between the conducting short and the reference surface of the conductive stage being L1;

    wherein L2 and L1 are capable of adjustment in the reactor by moving the conducting short, such that different microwave modes are produced in the first microwave chamber and in the second microwave chamber during operation of the reactor.

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