High power top emitting vertical cavity surface emitting laser
First Claim
1. A method of adjusting a power density of a metal contact VCSEL array comprising the steps of:
- establishing a relationship for a specified test array between an effective lateral size of a laser active region of VCSEL elements of a defined design, a pitch of nearest neighbors of the VCSEL elements when arranged according to the specified test array and a power output by the specified test array,determining positions of VCSEL elements having the defined design within the VCSEL array on the basis of the relationship, andmanufacturing the VCSEL array with VCSEL elements of the defined design by forming the VCSEL elements substantially at the positions.
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Accused Products
Abstract
A method of adjusting a power density in a laser device including a VCSEL array providing an increased power density at a high wall-plug efficiency in that the lateral design parameters are appropriately selected on the basis of a relationship that has been established for a specified vertical design, a corresponding process technology and specified operating conditions. Thus, the total output power, the power density, and the efficiency may be optimized independently from other design criteria and application requirements by tuning only the lateral size of the individual VCSEL elements and the pitch of nearest neighbors of the elements within the array. Hence, for a lateral size of less than 30 μm and a pitch of less than 80 μm, a highly efficient VCSEL array can be provided with a high power density, thereby optimizing manufacturing costs for the output power per chip area.
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Citations
11 Claims
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1. A method of adjusting a power density of a metal contact VCSEL array comprising the steps of:
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establishing a relationship for a specified test array between an effective lateral size of a laser active region of VCSEL elements of a defined design, a pitch of nearest neighbors of the VCSEL elements when arranged according to the specified test array and a power output by the specified test array, determining positions of VCSEL elements having the defined design within the VCSEL array on the basis of the relationship, and manufacturing the VCSEL array with VCSEL elements of the defined design by forming the VCSEL elements substantially at the positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification