VACUUM PROCESSING APPARATUS
First Claim
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1. A vacuum processing apparatus, comprising:
- a vacuum chamber configured to maintain a first pressure lower than an atmospheric pressure;
a driving source disposed in said vacuum chamber and configured to control movement of a processing object;
an electric power supply mechanism including a primary side mechanism disposed outside said vacuum chamber and a secondary side mechanism disposed in said vacuum chamber, said primary side mechanism being configured to wirelessly transfer electric power to said driving source via said secondary side mechanism; and
a vessel configured to airtightly accommodate said secondary side mechanism under a second pressure higher than the first pressure.
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Abstract
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.
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Citations
11 Claims
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1. A vacuum processing apparatus, comprising:
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a vacuum chamber configured to maintain a first pressure lower than an atmospheric pressure; a driving source disposed in said vacuum chamber and configured to control movement of a processing object; an electric power supply mechanism including a primary side mechanism disposed outside said vacuum chamber and a secondary side mechanism disposed in said vacuum chamber, said primary side mechanism being configured to wirelessly transfer electric power to said driving source via said secondary side mechanism; and a vessel configured to airtightly accommodate said secondary side mechanism under a second pressure higher than the first pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A vacuum processing apparatus, comprising:
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a vacuum chamber for maintaining a first pressure lower than an atmospheric pressure; driving means for controlling movement of a processing object, said driving means being disposed in said vacuum chamber; electric power supplying means, including primary side power supplying means disposed outside said vacuum chamber and secondary side power supplying means disposed in said vacuum chamber, for wirelessly transferring electric power from said primary side power supplying means to said driving means via said secondary side power supplying means; and a vessel for airtightly accommodating said secondary side mechanism under a second pressure higher than the first pressure.
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11. A method of operating a vacuum processing apparatus, comprising:
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maintaining a first pressure in a vacuum chamber lower than an atmospheric pressure; providing electric power to a primary side mechanism disposed outside said vacuum chamber; wirelessly transferring the electric power from said primary side mechanism to a driving source, the electric power being transferred to said driving source via a secondary side mechanism disposed in said vacuum chamber; and maintaining, in a vessel that is airtight, said secondary side mechanism under a second pressure higher than the first pressure.
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Specification